SEMICONDUCTOR PACKAGE
    95.
    发明公开

    公开(公告)号:US20230282528A1

    公开(公告)日:2023-09-07

    申请号:US17897729

    申请日:2022-08-29

    IPC分类号: H01L21/66 H01L23/00

    摘要: A semiconductor package is provided. The semiconductor package includes a first semiconductor substrate, a first semiconductor element layer on an upper surface of the first semiconductor substrate, a first wiring structure on the first semiconductor element layer, a first connecting pad connected to the first wiring structure, a first test pad connected to the first wiring structure, a first front side bonding pad connected to the first connecting pad and including copper (Cu), and a second front side bonding pad connected to the first front side bonding pad and including copper (Cu) which has a nanotwin crystal structure different from a crystal structure of copper (Cu) included in the first front side bonding pad, wherein a width of the first front side bonding pad in the horizontal direction is different from a width of the second front side bonding pad in the horizontal direction.