公开(公告)号：US09355975B2

公开(公告)日：2016-05-31

申请号：US14339355

申请日：2014-07-23

Applicant: XINTEC INC.

Inventor： Yen-Shih Ho ,  Tsang-Yu Liu ,  Shu-Ming Chang ,  Yu-Lung Huang ,  Chao-Yen Lin ,  Wei-Luen Suen ,  Chien-Hui Chen ,  Chi-Chang Liao

IPC: H01L23/00 ,  H01L21/78 ,  H01L21/768 ,  H01L23/31 ,  H01L21/56 ,  H01L29/06 ,  H01L23/525 ,  H01L23/532 ,  H01L25/065

CPC classification number: H01L24/05 ,  H01L21/561 ,  H01L21/76838 ,  H01L21/78 ,  H01L23/3121 ,  H01L23/3192 ,  H01L23/525 ,  H01L23/5329 ,  H01L24/16 ,  H01L24/32 ,  H01L24/45 ,  H01L24/48 ,  H01L24/73 ,  H01L25/0657 ,  H01L29/0657 ,  H01L2224/02381 ,  H01L2224/024 ,  H01L2224/0401 ,  H01L2224/04042 ,  H01L2224/05548 ,  H01L2224/05558 ,  H01L2224/05567 ,  H01L2224/05572 ,  H01L2224/05611 ,  H01L2224/05624 ,  H01L2224/05644 ,  H01L2224/05647 ,  H01L2224/05655 ,  H01L2224/05669 ,  H01L2224/05687 ,  H01L2224/0569 ,  H01L2224/16225 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2224/48145 ,  H01L2224/48227 ,  H01L2224/48611 ,  H01L2224/48624 ,  H01L2224/48644 ,  H01L2224/48647 ,  H01L2224/48655 ,  H01L2224/48669 ,  H01L2224/48687 ,  H01L2224/4869 ,  H01L2224/73203 ,  H01L2224/73265 ,  H01L2224/94 ,  H01L2924/00014 ,  H01L2924/10155 ,  H01L2924/10156 ,  H01L2924/10253 ,  H01L2924/10523 ,  H01L2924/12041 ,  H01L2924/14 ,  H01L2924/1461 ,  H01L2924/3701 ,  H01L2224/03 ,  H01L2924/00 ,  H01L2224/05552 ,  H01L2924/00012

Abstract: A chip package including a chip having an upper surface, a lower surface and a sidewall is provided. The chip includes a signal pad region adjacent to the upper surface. A first recess extends from the upper surface toward the lower surface along the sidewall. At least one second recess extends from a first bottom of the first recess toward the lower surface. The first and second recesses further laterally extend along a side of the upper surface, and a length of the first recess extending along the side is greater than that of the second recess extending along the side. A redistribution layer is electrically connected to the signal pad region and extends into the second recess. A method for forming the chip package is also provided.

Abstract translation: 提供了包括具有上表面，下表面和侧壁的芯片的芯片封装。 芯片包括与上表面相邻的信号焊盘区域。 第一凹部沿着侧壁从上表面向下表面延伸。 至少一个第二凹部从第一凹部的第一底部向下表面延伸。 第一和第二凹部沿着上表面的侧面进一步横向延伸，并且沿着侧面延伸的第一凹部的长度大于沿着侧面延伸的第二凹部的长度。 再分配层电连接到信号焊盘区域并延伸到第二凹槽中。 还提供了一种用于形成芯片封装的方法。

公开(公告)号：US09287417B2

公开(公告)日：2016-03-15

申请号：US14157379

申请日：2014-01-16

Applicant: XINTEC INC.

Inventor： Wei-Luen Suen ,  Shu-Ming Chang ,  Yu-Lung Huang ,  Yen-Shih Ho ,  Tsang-Yu Liu

IPC: H01L23/58 ,  H01L31/02 ,  H01L23/31 ,  H01L23/48 ,  H01L21/768 ,  H01L21/78 ,  H01L23/00 ,  H01L21/683 ,  H01L23/525

CPC classification number: H01L31/02005 ,  H01L21/6836 ,  H01L21/76898 ,  H01L21/78 ,  H01L23/3114 ,  H01L23/3171 ,  H01L23/481 ,  H01L23/525 ,  H01L24/02 ,  H01L24/11 ,  H01L24/13 ,  H01L24/92 ,  H01L24/94 ,  H01L2221/68304 ,  H01L2221/68327 ,  H01L2221/6834 ,  H01L2221/68368 ,  H01L2221/68372 ,  H01L2221/68381 ,  H01L2224/02313 ,  H01L2224/02371 ,  H01L2224/02372 ,  H01L2224/0239 ,  H01L2224/0401 ,  H01L2224/11002 ,  H01L2224/11472 ,  H01L2224/1148 ,  H01L2224/13022 ,  H01L2224/13024 ,  H01L2224/131 ,  H01L2224/13111 ,  H01L2224/92 ,  H01L2224/94 ,  H01L2924/3511 ,  H01L2924/014 ,  H01L2924/01013 ,  H01L2924/01029 ,  H01L2924/01028 ,  H01L2924/00014 ,  H01L2224/0231 ,  H01L2224/11

Abstract: Disclosed herein is a semiconductor chip package, which includes a semiconductor chip, a plurality of vias, an isolation layer, a redistribution layer, and a packaging layer. The vias extend from the lower surface to the upper surface of the semiconductor chip. The vias include at least one first via and at least one second via. The isolation layer also extends from the lower surface to the upper surface of the semiconductor chip, and part of the isolation layer is disposed in the vias. The sidewall of the first via is totally covered by the isolation layer while the sidewall of the second via is partially covered by the isolation layer. The redistribution layer is disposed below the isolation layer and fills the plurality of vias, and the packaging layer is disposed below the isolation layer.

Abstract translation: 这里公开了一种半导体芯片封装，其包括半导体芯片，多个通孔，隔离层，再分配层和封装层。 通孔从半导体芯片的下表面延伸到上表面。 通孔包括至少一个第一通孔和至少一个第二通孔。 隔离层也从半导体芯片的下表面延伸到上表面，并且隔离层的一部分设置在通孔中。 第一通孔的侧壁完全被隔离层覆盖，而第二通孔的侧壁被隔离层部分地覆盖。 再分配层设置在隔离层下方并填充多个通孔，并且包装层设置在隔离层下方。

公开(公告)号：US09275958B2

公开(公告)日：2016-03-01

申请号：US14207224

申请日：2014-03-12

Applicant: XINTEC INC.

Inventor： Yi-Min Lin ,  Yi-Ming Chang ,  Shu-Ming Chang ,  Yen-Shih Ho ,  Tsang-Yu Liu ,  Chia-Ming Cheng

IPC: H01L27/146 ,  H01L23/552 ,  H01L21/48 ,  H01L21/78 ,  H01L29/06 ,  H01L23/00 ,  H01L25/065

CPC classification number: H01L23/552 ,  H01L21/4814 ,  H01L21/78 ,  H01L23/544 ,  H01L24/02 ,  H01L24/03 ,  H01L24/05 ,  H01L24/45 ,  H01L24/48 ,  H01L24/85 ,  H01L24/92 ,  H01L25/0657 ,  H01L29/0657 ,  H01L2223/5446 ,  H01L2224/02313 ,  H01L2224/0235 ,  H01L2224/02371 ,  H01L2224/0239 ,  H01L2224/03614 ,  H01L2224/04042 ,  H01L2224/04105 ,  H01L2224/05548 ,  H01L2224/05571 ,  H01L2224/451 ,  H01L2224/48225 ,  H01L2224/48227 ,  H01L2224/4847 ,  H01L2224/92 ,  H01L2924/00014 ,  H01L2924/10155 ,  H01L2924/10156 ,  H01L2924/10157 ,  H01L2924/13091 ,  H01L2924/1461 ,  H01L2924/00 ,  H01L2924/01029 ,  H01L2924/01079 ,  H01L2924/01078 ,  H01L2924/01028 ,  H01L2924/0105 ,  H01L2924/01013 ,  H01L2924/01047 ,  H01L2924/01022 ,  H01L2924/01074 ,  H01L2924/00012 ,  H01L2224/85 ,  H01L2924/014 ,  H01L2224/85399 ,  H01L2224/05599

Abstract: An embodiment of the invention provides a chip package which includes: a semiconductor substrate having a first surface and a second surface; a first recess extending from the first surface towards the second surface; a second recess extending from a bottom of the first recess towards the second surface, wherein a sidewall and the bottom of the first recess and a second sidewall and a second bottom of the second recess together form an exterior side surface of the semiconductor substrate; a wire layer disposed over the first surface and extending into the first recess and/or the second recess; an insulating layer positioned between the wire layer and the semiconductor substrate; and a metal light shielding layer disposed over the first surface and having at least one hole, wherein a shape of the at least one hole is a quadrangle.

Abstract translation: 本发明的实施例提供一种芯片封装，其包括：具有第一表面和第二表面的半导体衬底; 从所述第一表面延伸到所述第二表面的第一凹部; 从所述第一凹部的底部朝向所述第二表面延伸的第二凹部，其中所述第一凹部的侧壁和所述底部以及所述第二凹部的第二侧壁和第二底部一起形成所述半导体衬底的外侧表面; 布置在所述第一表面上并延伸到所述第一凹部和/或所述第二凹部中的导线层; 位于所述导线层和所述半导体基板之间的绝缘层; 以及设置在所述第一表面上并且具有至少一个孔的金属遮光层，其中所述至少一个孔的形状是四边形。

公开(公告)号：US09165890B2

公开(公告)日：2015-10-20

申请号：US13941854

申请日：2013-07-15

Applicant: XINTEC INC.

Inventor： Yen-Shih Ho ,  Shih-Chin Chen ,  Yi-Ming Chang ,  Chien-Hui Chen ,  Chia-Ming Cheng ,  Wei-Luen Suen ,  Chen-Han Chiang

IPC: H01L23/544 ,  H01L23/48 ,  H01L23/52 ,  H01L29/40 ,  H01L21/78 ,  H01L23/31 ,  H01L23/00

CPC classification number: H01L23/544 ,  H01L21/78 ,  H01L23/3185 ,  H01L24/05 ,  H01L24/06 ,  H01L24/13 ,  H01L24/14 ,  H01L2223/5442 ,  H01L2223/54426 ,  H01L2223/54453 ,  H01L2223/5446 ,  H01L2224/02371 ,  H01L2224/02377 ,  H01L2224/03462 ,  H01L2224/0401 ,  H01L2224/05548 ,  H01L2224/05554 ,  H01L2224/05567 ,  H01L2224/05569 ,  H01L2224/05624 ,  H01L2224/05644 ,  H01L2224/05647 ,  H01L2224/05669 ,  H01L2224/06155 ,  H01L2224/0616 ,  H01L2224/13022 ,  H01L2224/13024 ,  H01L2224/131 ,  H01L2224/14155 ,  H01L2224/1416 ,  H01L2224/97 ,  H01L2924/00014 ,  H01L2924/13091 ,  H01L2924/1461 ,  H01L2924/15788 ,  H01L2224/03 ,  H01L2224/11 ,  H01L2924/014 ,  H01L2924/00 ,  H01L2224/05552

Abstract: An embodiment of the invention provides a chip package which includes: a semiconductor substrate having a first surface and an opposite second surface; a device region disposed in the substrate; a dielectric layer located on the first surface of the semiconductor substrate; a plurality of conducting pads located in the dielectric layer and electrically connected to the device region; at least one alignment mark disposed in the semiconductor substrate and extending from the second surface towards the first surface.

Abstract translation: 本发明的实施例提供一种芯片封装，其包括：具有第一表面和相对的第二表面的半导体衬底; 设置在所述基板中的装置区域; 位于半导体衬底的第一表面上的电介质层; 位于所述电介质层中并电连接到所述器件区域的多个导电焊盘; 设置在所述半导体衬底中并且从所述第二表面朝向所述第一表面延伸的至少一个对准标记。

公开(公告)号：US11476293B2

公开(公告)日：2022-10-18

申请号：US16950810

申请日：2020-11-17

Applicant: XINTEC INC.

Inventor： Yen-Shih Ho ,  Tsang-Yu Liu ,  Po-Han Lee

IPC: H01L27/146 ,  H01L23/00

Abstract: A manufacturing method of a chip package includes forming a temporary bonding layer on a carrier; forming an encapsulation layer on a top surface of a wafer or on the temporary bonding layer; bonding the carrier to the wafer, in which the encapsulation layer covers a sensor and a conductive pad of the wafer; patterning a bottom surface of the wafer to form a through hole, in which the conductive pad is exposed through the through hole; forming an isolation layer on the bottom surface of the wafer and a sidewall of the through hole; forming a redistribution layer on the isolation layer and the conductive pad that is in the through hole; forming a passivation layer on the isolation layer and the redistribution layer; and removing the temporary bonding layer and the carrier.

公开(公告)号：US11038077B2

公开(公告)日：2021-06-15

申请号：US16291637

申请日：2019-03-04

Applicant: XINTEC INC.

Inventor： Yen-Shih Ho ,  Po-Han Lee ,  Chien-Min Lin ,  Yi-Rong Ho

IPC: H01L31/12 ,  H01L31/02 ,  H01L31/0203 ,  H01L31/0216 ,  H01L31/18 ,  H01L31/028

Abstract: A chip package includes a chip, a sidewall structure that has a first light-shielding layer, a second light-shielding layer, and a cover. The chip has a light emitter and a light receiver that are located on a top surface of the chip. The sidewall structure is located on the top surface of the chip and has two aperture areas. The light emitter and the light receiver are respectively located in the two aperture areas. The sidewall structure surrounds the light emitter and the light receiver, and at least one surface of the sidewall structure has the first light-shielding layer. The second light-shielding layer is located between the chip and the sidewall structure. The cover is located on a surface of the sidewall structure facing away from the chip, and at least covers the light receiver and the sidewall structure that surrounds the light receiver.

公开(公告)号：US10388541B2

公开(公告)日：2019-08-20

申请号：US15098278

申请日：2016-04-13

Applicant: XINTEC INC.

Inventor： Yu-Tung Chen ,  Quan-Qun Su ,  Chuan-Jin Shiu ,  Chien-Hui Chen ,  Hsiao-Lan Yeh ,  Yen-Shih Ho

IPC: H01L21/56 ,  H01L21/687 ,  H01L21/67 ,  H01L23/31 ,  H01L21/768 ,  H01L21/02 ,  H01L23/00

Abstract: A wafer coating system includes a wafer chuck, a flowing insulating material sprayer and a wafer tilting lifting pin. The wafer chuck has a carrier part and a rotating part, which the carrier part is mounted on the rotating part to carry a wafer, and the rotating part is configured to rotate with a predetermined axis. The flowing insulating material sprayer is above the wafer chuck and configured to spray a flowing insulating material to the wafer, and the wafer tilting lifting pin is configured to form a first acute angle between the wafer and direction of gravity.

公开(公告)号：US09761555B2

公开(公告)日：2017-09-12

申请号：US14604525

申请日：2015-01-23

Applicant: XINTEC INC.

Inventor： Jiun-Yen Lai ,  Yu-Wen Hu ,  Bai-Yao Lou ,  Chia-Sheng Lin ,  Yen-Shih Ho ,  Hsin Kuan

IPC: H01L31/00 ,  H01L23/00 ,  H01L23/522 ,  H01L49/02

CPC classification number: H01L24/81 ,  H01L23/5227 ,  H01L24/03 ,  H01L24/05 ,  H01L24/13 ,  H01L24/48 ,  H01L28/10 ,  H01L2224/03462 ,  H01L2224/0347 ,  H01L2224/03902 ,  H01L2224/0391 ,  H01L2224/0401 ,  H01L2224/04042 ,  H01L2224/05005 ,  H01L2224/05007 ,  H01L2224/05022 ,  H01L2224/05026 ,  H01L2224/05027 ,  H01L2224/05147 ,  H01L2224/05155 ,  H01L2224/05164 ,  H01L2224/05562 ,  H01L2224/05564 ,  H01L2224/05571 ,  H01L2224/05583 ,  H01L2224/05644 ,  H01L2224/13021 ,  H01L2224/1308 ,  H01L2224/131 ,  H01L2224/13147 ,  H01L2224/13155 ,  H01L2224/13164 ,  H01L2224/13562 ,  H01L2224/13644 ,  H01L2224/48 ,  H01L2924/00014 ,  H01L2224/45099 ,  H01L2924/00012 ,  H01L2924/014

Abstract: A manufacturing method of a passive component structure includes the following steps. A protection layer is formed on a substrate, and bond pads of the substrate are respectively exposed through protection layer openings. A conductive layer is formed on the bond pads and the protection layer. A patterned photoresist layer is formed on the conductive layer, and the conductive layer adjacent to the protection layer openings is exposed through photoresist layer openings. Copper bumps are respectively electroplated on the conductive layer. The photoresist layer and the conductive layer not covered by the copper bumps are removed. A passivation layer is formed on the copper bumps and the protection layer, and at least one of the copper bumps is exposed through a passivation layer opening. A diffusion barrier layer and an oxidation barrier layer are chemically plated in sequence on the copper bump.

公开(公告)号：US09640683B2

公开(公告)日：2017-05-02

申请号：US14640307

申请日：2015-03-06

Applicant: XINTEC INC.

Inventor： Wei-Luen Suen ,  Wei-Ming Chien ,  Po-Han Lee ,  Tsang-Yu Liu ,  Yen-Shih Ho

IPC: H01L31/0232 ,  H01L31/18 ,  H01L31/0236 ,  H01L31/02 ,  H01L31/0203 ,  H01L23/31 ,  H01L21/56

CPC classification number: H01L31/02327 ,  H01L21/561 ,  H01L23/3114 ,  H01L31/02002 ,  H01L31/0203 ,  H01L31/02363 ,  H01L31/1804 ,  H01L2224/11

Abstract: A semiconductor structure includes a silicon substrate, a protection layer, an electrical pad, an isolation layer, a redistribution layer, a conductive layer, a passivation layer, and a conductive structure. The silicon substrate has a concave region, a step structure, a tooth structure, a first surface, and a second surface opposite to the first surface. The step structure and the tooth structure surround the concave region. The step structure has a first oblique surface, a third surface, and a second oblique surface facing the concave region and connected in sequence. The protection layer is located on the first surface of the silicon substrate. The electrical pad is located in the protection layer and exposed through the concave region. The isolation layer is located on the first and second oblique surfaces, the second and third surfaces of the step structure, and the tooth structure.

公开(公告)号：US09570398B2

公开(公告)日：2017-02-14

申请号：US13895219

申请日：2013-05-15

Applicant: XINTEC INC.

Inventor： Shu-Ming Chang ,  Yu-Ting Huang ,  Tsang-Yu Liu ,  Yen-Shih Ho

IPC: H01L23/538 ,  H01L21/78 ,  H01L23/48 ,  B81B7/00 ,  H01L23/00 ,  H01L21/683 ,  H01L23/60

CPC classification number: H01L23/5384 ,  B81B7/007 ,  B81B2207/095 ,  B81B2207/096 ,  H01L21/6835 ,  H01L21/78 ,  H01L23/481 ,  H01L23/60 ,  H01L24/02 ,  H01L24/03 ,  H01L24/05 ,  H01L24/08 ,  H01L24/11 ,  H01L24/13 ,  H01L24/29 ,  H01L24/32 ,  H01L24/80 ,  H01L24/83 ,  H01L24/92 ,  H01L24/94 ,  H01L2221/68327 ,  H01L2221/68381 ,  H01L2224/02331 ,  H01L2224/02371 ,  H01L2224/03002 ,  H01L2224/0401 ,  H01L2224/05548 ,  H01L2224/05617 ,  H01L2224/05624 ,  H01L2224/08147 ,  H01L2224/08148 ,  H01L2224/13021 ,  H01L2224/13024 ,  H01L2224/131 ,  H01L2224/2919 ,  H01L2224/32225 ,  H01L2224/8385 ,  H01L2224/92 ,  H01L2224/94 ,  H01L2924/10155 ,  H01L2924/1306 ,  H01L2924/13091 ,  H01L2924/1461 ,  H01L2924/00 ,  H01L2924/014 ,  H01L2924/00014 ,  H01L2924/01032 ,  H01L2224/80 ,  H01L2224/83 ,  H01L21/304 ,  H01L21/76898 ,  H01L2221/68304 ,  H01L2224/0231 ,  H01L2224/11

Abstract: An embodiment of the invention provides a chip package which includes: a first substrate; a second substrate disposed thereon, wherein the second substrate includes a lower semiconductor layer, an upper semiconductor layer, and an insulating layer therebetween, and a portion of the lower semiconductor layer electrically contacts with at least one pad on the first substrate; a conducting layer disposed on the upper semiconductor layer of the second substrate and electrically connected to the portion of the lower semiconductor layer electrically contacting with the at least one pad; an opening extending from the upper semiconductor layer towards the lower semiconductor layer and extending into the lower semiconductor layer; and a protection layer disposed on the upper semiconductor layer and the conducting layer, wherein the protection layer extends onto a portion of a sidewall of the opening, and does not cover the lower semiconductor layer in the opening.

Abstract translation: 本发明的实施例提供一种芯片封装，其包括：第一基板; 设置在其上的第二基板，其中所述第二基板包括下半导体层，上半导体层和绝缘层，并且所述下半导体层的一部分与所述第一基板上的至少一个焊盘电接触; 导电层，其设置在所述第二基板的所述上半导体层上并电连接到所述下半导体层与所述至少一个焊盘电接触的部分; 从上半导体层向下半导体层延伸并延伸到下半导体层的开口; 以及设置在所述上​​半导体层和所述导电层上的保护层，其中所述保护层延伸到所述开口的侧壁的一部分上，并且不覆盖所述开口中的下半导体层。