Methods for forming through-wafer interconnects, intermediate structures so formed, and devices and systems having at least one solder dam structure
    8.
    发明申请
    Methods for forming through-wafer interconnects, intermediate structures so formed, and devices and systems having at least one solder dam structure 有权
    用于形成贯穿晶片互连的方法,如此形成的中间结构,以及具有至少一个焊料坝结构的器件和系统

    公开(公告)号:US20070045779A1

    公开(公告)日:2007-03-01

    申请号:US11218705

    申请日:2005-09-01

    Applicant: W. Hiatt

    Inventor: W. Hiatt

    Abstract: A method for forming through-wafer interconnects (TWI) in a substrate of a thickness in excess of that of a semiconductor die such as a semiconductor wafer. Blind holes are formed from the active surface, sidewalls thereof passivated and coated with a solder-wetting material. A vent hole is then formed from the opposite surface (e.g., wafer back side) to intersect the blind hole. The blind hole is solder filled, followed by back thinning of the vent hole portion of the wafer to a final substrate thickness to expose the solder and solder-wetting material at both the active surface and the thinned back side. A metal layer such as nickel, having a glass transition temperature greater than that of the solder, may be plated to form a dam structure covering one or both ends of the TWI including the solder and solder-wetting material to prevent leakage of molten solder from the TWI during high temperature excursions. Intermediate structures of semiconductor devices, semiconductor devices and systems are also disclosed.

    Abstract translation: 一种用于在衬底中形成厚度超过诸如半导体晶片的半导体管芯的厚度的贯穿晶片互连(TWI)的方法。 盲孔由活性表面形成,其侧壁钝化并涂覆有焊料润湿材料。 然后从相对表面(例如,晶片背面)形成通气孔以与盲孔相交。 盲孔被焊料填充,随后使晶片的通气孔部分的背面变薄至最终的基板厚度,以在活性表面和变薄的背面暴露焊料和焊料润湿材料。 可以镀覆玻璃化转变温度高于焊料的金属层,以形成覆盖TWI的一端或两端的坝结构,包括焊料和焊料润湿材料,以防止熔融焊料从 TWI在高温偏移期间。 还公开了半导体器件,半导体器件和系统的中间结构。

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