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公开(公告)号:US20190088633A1
公开(公告)日:2019-03-21
申请号:US15919570
申请日:2018-03-13
Applicant: Invensas Corporation
Inventor: Min Tao , Liang Wang , Rajesh Katkar , Cyprian Emeka Uzoh
IPC: H01L25/16 , H01L25/075 , H01L33/62 , H01L33/32 , H01L33/38 , H01L27/12 , H01L33/60 , H01L33/58 , H01L33/00 , H01L33/44
Abstract: Direct-bonded LED arrays and applications are provided. An example process fabricates a LED structure that includes coplanar electrical contacts for p-type and n-type semiconductors of the LED structure on a flat bonding interface surface of the LED structure. The coplanar electrical contacts of the flat bonding interface surface are direct-bonded to electrical contacts of a driver circuit for the LED structure. In a wafer-level process, micro-LED structures are fabricated on a first wafer, including coplanar electrical contacts for p-type and n-type semiconductors of the LED structures on the flat bonding interface surfaces of the wafer. At least the coplanar electrical contacts of the flat bonding interface are direct-bonded to electrical contacts of CMOS driver circuits on a second wafer. The process provides a transparent and flexible micro-LED array display, with each micro-LED structure having an illumination area approximately the size of a pixel or a smallest controllable element of an image represented on a high-resolution video display.
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公开(公告)号:US10103093B2
公开(公告)日:2018-10-16
申请号:US15441783
申请日:2017-02-24
Applicant: Invensas Corporation
Inventor: Zhuowen Sun , Cyprian Emeka Uzoh , Yong Chen
IPC: H01L23/498 , H01L23/48 , H01L25/065 , H01L23/538 , H01L21/48 , H01L23/532 , H01L23/00
Abstract: An apparatus relating generally to a substrate is disclosed. In such an apparatus, the substrate has a first surface and a second surface opposite the first surface. The first surface and the second surface define a thickness of the substrate. A via structure extends from the first surface of the substrate to the second surface of the substrate. The via structure has a first terminal at or proximate to the first surface and a second terminal at or proximate to the second surface provided by a conductive member of the via structure extending from the first terminal to the second terminal. A barrier layer of the via structure is disposed between at least a portion of the conductive member and the substrate. The barrier layer has a conductivity configured to offset a capacitance between the conductive member and the substrate when a signal is passed through the conductive member of the via structure.
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公开(公告)号:US10032647B2
公开(公告)日:2018-07-24
申请号:US15587930
申请日:2017-05-05
Applicant: Invensas Corporation
Inventor: Rajesh Katkar , Cyprian Emeka Uzoh
IPC: H01L23/48 , H01L21/48 , H01L21/683 , H01L23/498
CPC classification number: H01L23/481 , H01L21/481 , H01L21/4853 , H01L21/486 , H01L21/4889 , H01L21/6835 , H01L21/76898 , H01L23/3731 , H01L23/3738 , H01L23/49827 , H01L24/43 , H01L24/46 , H01L2221/68345 , H01L2221/68359 , H01L2224/023 , H01L2224/4502 , H01L2924/00014 , H01L2924/15311 , H01L2224/45099 , H01L2224/45015 , H01L2924/207
Abstract: A component such as an interposer or microelectronic element can be fabricated with a set of vertically extending interconnects of wire bond structure. Such method may include forming a structure having wire bonds extending in an axial direction within one of more openings in an element and each wire bond spaced at least partially apart from a wall of the opening within which it extends, the element consisting essentially of a material having a coefficient of thermal expansion (“CTE”) of less than 10 parts per million per degree Celsius (“ppm/° C.”). First contacts can then be provided at a first surface of the component and second contacts provided at a second surface of the component facing in a direction opposite from the first surface, the first contacts electrically coupled with the second contacts through the wire bonds.
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公开(公告)号:US09991231B2
公开(公告)日:2018-06-05
申请号:US15234425
申请日:2016-08-11
Applicant: Invensas Corporation
Inventor: Charles G. Woychik , Cyprian Emeka Uzoh , Ron Zhang , Daniel Buckminster , Guilian Gao
IPC: H01L21/48 , H01L25/065 , H01L21/52 , H01L21/78 , H01L23/48 , H01L23/498 , H01L23/00 , H01L21/768 , H01L21/304 , H01L21/56 , H01L23/31 , H01L25/00 , H01L23/13
CPC classification number: H01L25/0657 , H01L21/304 , H01L21/4853 , H01L21/486 , H01L21/52 , H01L21/565 , H01L21/76898 , H01L21/78 , H01L23/13 , H01L23/3114 , H01L23/481 , H01L23/49827 , H01L23/49838 , H01L23/49894 , H01L24/13 , H01L24/16 , H01L24/17 , H01L24/32 , H01L24/73 , H01L24/85 , H01L24/92 , H01L24/94 , H01L24/97 , H01L25/0652 , H01L25/0655 , H01L25/50 , H01L2224/13025 , H01L2224/131 , H01L2224/13147 , H01L2224/16145 , H01L2224/16146 , H01L2224/16225 , H01L2224/16235 , H01L2224/16238 , H01L2224/1703 , H01L2224/17181 , H01L2224/32145 , H01L2224/32225 , H01L2224/32245 , H01L2224/73204 , H01L2224/73253 , H01L2224/92125 , H01L2224/94 , H01L2224/97 , H01L2225/06513 , H01L2225/06517 , H01L2225/06541 , H01L2225/06544 , H01L2225/06548 , H01L2225/06555 , H01L2225/06582 , H01L2225/06589 , H01L2924/00014 , H01L2924/15159 , H01L2924/15192 , H01L2924/15311 , H01L2924/16152 , H01L2924/16235 , H01L2924/16251 , H01L2924/181 , H01L2924/18161 , H01L2924/3511 , H01L2224/83 , H01L2224/81 , H01L2924/014 , H01L2924/0105 , H01L2924/00 , H01L2224/45099 , H01L2924/00012
Abstract: An apparatus relates generally to an integrated circuit package. In such an apparatus, a package substrate has a first plurality of via structures extending from a lower surface of the package substrate to an upper surface of the package substrate. An die has a second plurality of via structures extending to a lower surface of the die. The lower surface of the die faces the upper surface of the package substrate in the integrated circuit package. The package substrate does not include a redistribution layer. The die and the package substrate are coupled to one another.
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公开(公告)号:US20180130691A1
公开(公告)日:2018-05-10
申请号:US15629460
申请日:2017-06-21
Applicant: Invensas Corporation
Inventor: Cyprian Emeka Uzoh
IPC: H01L21/683 , H01L21/67 , H01L23/00 , H01L25/00
CPC classification number: H01L21/6835 , H01L21/67092 , H01L21/67144 , H01L24/75 , H01L24/80 , H01L24/95 , H01L24/97 , H01L25/0657 , H01L25/50 , H01L2221/68313 , H01L2221/68354 , H01L2221/68363 , H01L2224/08145 , H01L2224/7501 , H01L2224/753 , H01L2224/7565 , H01L2224/75755 , H01L2224/75804 , H01L2224/7598 , H01L2224/75983 , H01L2224/8001 , H01L2224/80896 , H01L2224/9511 , H01L2224/95136 , H01L2224/97 , H01L2225/06513 , H01L2225/06517 , H01L2924/00014 , H01L2224/80001
Abstract: Methods and apparatuses for stacking devices in an integrated circuit assembly are provided. A tray for supporting multiple dies of a semiconductor material enables both topside processing and bottom side processing of the dies. The dies can be picked and placed for bonding on a substrate or on die stacks without flipping the dies, thereby avoiding particulate debris from the diced edges of the dies from interfering and contaminating the bonding process. In an implementation, a liftoff apparatus directs a pneumatic flow of gas to lift the dies from the tray for bonding to a substrate, and to previously bonded dies, without flipping the dies. An example system allows processing of both top and bottom surfaces of the dies in a single cycle in preparation for bonding, and then pneumatically lifts the dies up to a target substrate so that topsides of the dies bond to bottom sides of dies of the previous batch, in an efficient and flip-free assembly of die stacks.
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公开(公告)号:US20180096960A1
公开(公告)日:2018-04-05
申请号:US15831231
申请日:2017-12-04
Applicant: Invensas Corporation
Inventor: Cyprian Emeka Uzoh , Rajesh Katkar
IPC: H01L23/00 , H05K3/34 , H01L25/00 , H01L25/065 , H01L21/683
CPC classification number: H01L24/17 , H01L21/6835 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/13 , H01L24/14 , H01L24/16 , H01L24/32 , H01L24/73 , H01L24/81 , H01L25/0657 , H01L25/50 , H01L2221/68372 , H01L2224/034 , H01L2224/03612 , H01L2224/0401 , H01L2224/05124 , H01L2224/05147 , H01L2224/05644 , H01L2224/05655 , H01L2224/05666 , H01L2224/1012 , H01L2224/10155 , H01L2224/11003 , H01L2224/11013 , H01L2224/111 , H01L2224/1111 , H01L2224/1112 , H01L2224/1132 , H01L2224/11334 , H01L2224/114 , H01L2224/11438 , H01L2224/1144 , H01L2224/1147 , H01L2224/116 , H01L2224/1161 , H01L2224/11849 , H01L2224/119 , H01L2224/11912 , H01L2224/13014 , H01L2224/1308 , H01L2224/13083 , H01L2224/13084 , H01L2224/131 , H01L2224/13111 , H01L2224/13124 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13155 , H01L2224/13166 , H01L2224/13171 , H01L2224/13181 , H01L2224/13184 , H01L2224/13187 , H01L2224/1329 , H01L2224/133 , H01L2224/13655 , H01L2224/13666 , H01L2224/13671 , H01L2224/13681 , H01L2224/13684 , H01L2224/1401 , H01L2224/1403 , H01L2224/16145 , H01L2224/16225 , H01L2224/16227 , H01L2224/32145 , H01L2224/32225 , H01L2224/73204 , H01L2224/81101 , H01L2224/81191 , H01L2224/81192 , H01L2224/81193 , H01L2224/81815 , H01L2224/92125 , H01L2225/06513 , H01L2924/01014 , H01L2924/01029 , H01L2924/0105 , H01L2924/01082 , H01L2924/014 , H01L2924/0781 , H01L2924/381 , H05K3/3436 , H05K3/3478 , H05K2203/0415 , H01L2924/00012 , H01L2924/00014 , H01L2924/00
Abstract: Representative implementations of devices and techniques provide interconnect structures and components for coupling various carriers, printed circuit board (PCB) components, integrated circuit (IC) dice, and the like, using tall and/or fine pitch physical connections. Multiple layers of conductive structures or materials are arranged to form the interconnect structures and components. Nonwettable barriers may be used with one or more of the layers to form a shape, including a pitch of one or more of the layers.
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公开(公告)号:US09859234B2
公开(公告)日:2018-01-02
申请号:US14819744
申请日:2015-08-06
Applicant: Invensas Corporation
Inventor: Cyprian Emeka Uzoh , Guilian Gao , Bongsub Lee , Scott McGrath , Hong Shen , Charles G. Woychik , Arkalgud R. Sitaram , Akash Agrawal
IPC: H01L21/00 , H01L23/00 , H01L21/311 , H01L23/48 , H01L23/498 , H01L21/48 , H01L23/532
CPC classification number: H01L24/03 , H01L21/31144 , H01L21/486 , H01L23/291 , H01L23/293 , H01L23/3171 , H01L23/3192 , H01L23/481 , H01L23/49816 , H01L23/49827 , H01L23/53214 , H01L23/53228 , H01L23/53257 , H01L23/5329 , H01L24/05 , H01L24/11 , H01L24/13 , H01L2224/02126 , H01L2224/03009 , H01L2224/03464 , H01L2224/0401 , H01L2224/05025 , H01L2224/05144 , H01L2224/05155 , H01L2224/0557 , H01L2224/05571 , H01L2224/05572 , H01L2224/0558 , H01L2224/10126 , H01L2224/13016 , H01L2224/13022 , H01L2224/131 , H01L2924/01013 , H01L2924/01028 , H01L2924/01029 , H01L2924/01074 , H01L2924/3511 , H01L2924/00012 , H01L2924/014
Abstract: A method of processing an interconnection element can include providing a substrate element having front and rear opposite surfaces and electrically conductive structure, a first dielectric layer overlying the front surface and a plurality of conductive contacts at a first surface of the first dielectric layer, and a second dielectric layer overlying the rear surface and having a conductive element at a second surface of the second dielectric layer. The method can also include removing a portion of the second dielectric layer so as to reduce the thickness of the portion, and to provide a raised portion of the second dielectric layer having a first thickness and a lowered portion having a second thickness. The first thickness can be greater than the second thickness. At least a portion of the conductive element can be recessed below a height of the first thickness of the second dielectric layer.
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公开(公告)号:US20170365546A1
公开(公告)日:2017-12-21
申请号:US15626687
申请日:2017-06-19
Applicant: Invensas Corporation
Inventor: Cyprian Emeka Uzoh , Pezhman Monadgemi , Terrence Caskey , Fatima Lina Ayatollahi , Belgacem Haba , Charles G. Woychik , Michael Newman
IPC: H01L23/498 , H01L23/48 , H01L23/367 , H01L21/768 , H01L23/373 , H01L23/36
CPC classification number: H01L23/49827 , H01L21/76829 , H01L21/76898 , H01L23/36 , H01L23/367 , H01L23/3677 , H01L23/3736 , H01L23/481 , H01L23/49838 , H01L23/49866 , H01L2924/00 , H01L2924/0002
Abstract: An interconnect element includes a semiconductor or insulating material layer that has a first thickness and defines a first surface; a thermally conductive layer; a plurality of conductive elements; and a dielectric coating. The thermally conductive layer includes a second thickness of at least 10 microns and defines a second surface of the interconnect element. The plurality of conductive elements extend from the first surface of the interconnect element to the second surface of the interconnect element. The dielectric coating is between at least a portion of each conductive element and the thermally conductive layer.
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公开(公告)号:US09842819B2
公开(公告)日:2017-12-12
申请号:US14832996
申请日:2015-08-21
Applicant: INVENSAS CORPORATION
Inventor: Cyprian Emeka Uzoh , Rajesh Katkar
IPC: H01L23/48 , H01L25/00 , H01L23/00 , H01L21/683 , H01L25/065
CPC classification number: H01L24/17 , H01L21/6835 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/13 , H01L24/14 , H01L24/16 , H01L24/32 , H01L24/73 , H01L24/81 , H01L25/0657 , H01L25/50 , H01L2221/68372 , H01L2224/034 , H01L2224/03612 , H01L2224/0401 , H01L2224/05124 , H01L2224/05147 , H01L2224/05644 , H01L2224/05655 , H01L2224/05666 , H01L2224/1012 , H01L2224/10155 , H01L2224/11003 , H01L2224/11013 , H01L2224/111 , H01L2224/1111 , H01L2224/1112 , H01L2224/1132 , H01L2224/11334 , H01L2224/114 , H01L2224/11438 , H01L2224/1144 , H01L2224/1147 , H01L2224/116 , H01L2224/1161 , H01L2224/11849 , H01L2224/119 , H01L2224/11912 , H01L2224/13014 , H01L2224/1308 , H01L2224/13083 , H01L2224/13084 , H01L2224/131 , H01L2224/13111 , H01L2224/13124 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13155 , H01L2224/13166 , H01L2224/13171 , H01L2224/13181 , H01L2224/13184 , H01L2224/13187 , H01L2224/1329 , H01L2224/133 , H01L2224/13655 , H01L2224/13666 , H01L2224/13671 , H01L2224/13681 , H01L2224/13684 , H01L2224/1401 , H01L2224/1403 , H01L2224/16145 , H01L2224/16225 , H01L2224/16227 , H01L2224/32145 , H01L2224/32225 , H01L2224/73204 , H01L2224/81101 , H01L2224/81191 , H01L2224/81192 , H01L2224/81193 , H01L2224/81815 , H01L2224/92125 , H01L2225/06513 , H01L2924/01014 , H01L2924/01029 , H01L2924/0105 , H01L2924/01082 , H01L2924/014 , H01L2924/0781 , H01L2924/381 , H05K3/3436 , H05K3/3478 , H05K2203/0415 , H01L2924/00012 , H01L2924/00014 , H01L2924/00
Abstract: Representative implementations of devices and techniques provide interconnect structures and components for coupling various carriers, printed circuit board (PCB) components, integrated circuit (IC) dice, and the like, using tall and/or fine pitch physical connections. Multiple layers of conductive structures or materials are arranged to form the interconnect structures and components. Nonwettable barriers may be used with one or more of the layers to form a shape, including a pitch of one or more of the layers.
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公开(公告)号:US09818713B2
公开(公告)日:2017-11-14
申请号:US15462360
申请日:2017-03-17
Applicant: Invensas Corporation
Inventor: Cyprian Emeka Uzoh
IPC: H01L23/00 , H01L23/498
CPC classification number: H01L24/17 , H01L21/4853 , H01L23/49811 , H01L23/49816 , H01L23/49838 , H01L24/11 , H01L24/13 , H01L24/16 , H01L24/81 , H01L24/83 , H01L25/0657 , H01L25/50 , H01L2224/03009 , H01L2224/03912 , H01L2224/0401 , H01L2224/05124 , H01L2224/05144 , H01L2224/05155 , H01L2224/05568 , H01L2224/05647 , H01L2224/11442 , H01L2224/1145 , H01L2224/11452 , H01L2224/1146 , H01L2224/11462 , H01L2224/11464 , H01L2224/1147 , H01L2224/11614 , H01L2224/1162 , H01L2224/1182 , H01L2224/13083 , H01L2224/13109 , H01L2224/13111 , H01L2224/13124 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13155 , H01L2224/13184 , H01L2224/13309 , H01L2224/13311 , H01L2224/13313 , H01L2224/13339 , H01L2224/13344 , H01L2224/13355 , H01L2224/13409 , H01L2224/13561 , H01L2224/1357 , H01L2224/13809 , H01L2224/13811 , H01L2224/13813 , H01L2224/13839 , H01L2224/13844 , H01L2224/13855 , H01L2224/1601 , H01L2224/16058 , H01L2224/16059 , H01L2224/16104 , H01L2224/16113 , H01L2224/16145 , H01L2224/16227 , H01L2224/16238 , H01L2224/16501 , H01L2224/81193 , H01L2224/81204 , H01L2224/81801 , H01L2224/8184 , H01L2224/83815 , H01L2924/01013 , H01L2924/01028 , H01L2924/01029 , H01L2924/01047 , H01L2924/0105 , H01L2924/01079 , H01L2924/014 , H01L2924/2064 , H01L2924/3511 , H01L2924/3841 , H01L2924/013
Abstract: A method of making an assembly can include forming a first conductive element at a first surface of a substrate of a first component, forming conductive nanoparticles at a surface of the conductive element by exposure to an electroless plating bath, juxtaposing the surface of the first conductive element with a corresponding surface of a second conductive element at a major surface of a substrate of a second component, and elevating a temperature at least at interfaces of the juxtaposed first and second conductive elements to a joining temperature at which the conductive nanoparticles cause metallurgical joints to form between the juxtaposed first and second conductive elements. The conductive nanoparticles can be disposed between the surfaces of the first and second conductive elements. The conductive nanoparticles can have long dimensions smaller than 100 nanometers.
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