Method of plating metal layer over isolated pads on semiconductor package substrate
    215.
    发明授权
    Method of plating metal layer over isolated pads on semiconductor package substrate 失效
    在半导体封装衬底上的隔离焊盘上镀覆金属层的方法

    公开(公告)号:US06916685B2

    公开(公告)日:2005-07-12

    申请号:US10686435

    申请日:2003-10-14

    Abstract: A method of plating a metal layer over isolated pads on a semiconductor package substrate is proposed. This substrate is formed with a plurality of conductive blind vias. The isolated pads are formed on a surface of the substrate, each having a plating line extending towards one blind via but electrically insulated from the blind via by an electrically insulating region. A conductive film covers the surface of the substrate having the isolated pads, and a photoresist layer is formed over the conductive film. The photoresist layer has openings for exposing a portion of the conductive film covering the isolated pads. The exposed portion of the conductive film is removed, to allow a metal layer to be plated on the isolated pads. Then, the photoresist layer and the remainder of the conductive film are removed, and the electrical insulation between the isolated pads and the blind vias is restored.

    Abstract translation: 提出了在半导体封装基板上的隔离焊盘上镀覆金属层的方法。 该衬底形成有多个导电盲孔。 孤立的焊盘形成在衬底的表面上,每个衬底具有朝向一个盲孔通过的电镀线,但是通过电绝缘区与盲孔电绝缘。 导电膜覆盖具有隔离焊盘的衬底的表面,并且在导电膜上形成光致抗蚀剂层。 光致抗蚀剂层具有用于暴露覆盖隔离垫的导电膜的一部分的开口。 去除导电膜的暴露部分,以允许将金属层电镀在隔离的焊盘上。 然后,去除光致抗蚀剂层和导电膜的其余部分,并且恢复隔离焊盘和盲孔之间的电绝缘。

    Printed circuit embedded capacitors
    216.
    发明申请
    Printed circuit embedded capacitors 失效
    印刷电路嵌入式电容器

    公开(公告)号:US20050128720A1

    公开(公告)日:2005-06-16

    申请号:US10736327

    申请日:2003-12-15

    Abstract: One of a plurality of capacitors embedded in a printed circuit structure includes a first electrode (415) overlaying a first substrate layer (505) of the printed circuit structure, a crystallized dielectric oxide core (405) overlaying the first electrode, a second electrode (615) overlying the crystallized dielectric oxide core, and a high temperature anti-oxidant layer (220) disposed between and contacting the crystallized dielectric oxide core and at least one of the first and second electrodes. The crystallized dielectric oxide core has a thickness that is less than 1 micron and has a capacitance density greater than 1000 pF/mm2. The material and thickness are the same for each of the plurality of capacitors. The crystallized dielectric oxide core may be isolated from crystallized dielectric oxide cores of all other capacitors of the plurality of capacitors.

    Abstract translation: 嵌入印刷电路结构中的多个电容器之一包括覆盖印刷电路结构的第一衬底层(505)的第一电极(415),覆盖第一电极的结晶化电介质氧化物芯(405),第二电极 615),以及设置在结晶的电介质氧化物芯和第一和第二电极中的至少一个之间并与其接触的高温抗氧化剂层(220)。 结晶的电介质氧化物芯的厚度小于1微米,电容密度大于1000pF / mm 2。 多个电容器的材料和厚度相同。 结晶的电介质氧化物芯可以与多个电容器的所有其它电容器的结晶的电介质氧化物芯隔离。

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