Semiconductor wafer and method of forming sacrificial bump pad for wafer probing during wafer sort test
    32.
    发明授权
    Semiconductor wafer and method of forming sacrificial bump pad for wafer probing during wafer sort test 有权
    半导体晶片和晶片分选测试期间用于晶圆探测的牺牲凸块的形成方法

    公开(公告)号:US08987014B2

    公开(公告)日:2015-03-24

    申请号:US12467094

    申请日:2009-05-15

    IPC分类号: H01L21/66 H01L23/31

    摘要: A semiconductor wafer contains a plurality of semiconductor die. A plurality of interconnect bump pads is formed over the semiconductor die. A plurality of sacrificial bump pads is formed in proximity to and diagonally offset with respect to the interconnect bump pads. The sacrificial bump pads have a different diameter than the interconnect bump pads. A conductive link is formed between each interconnect bump pad and proximate sacrificial bump pad. The sacrificial bump pads, interconnect bump pads, and conductive link are formed concurrently or during bump formation. The wafer is electrically tested by contacting the sacrificial bump pads. The electrical test identifies known good die and defective die. The sacrificial bump pads and a portion of the conductive link are removed after wafer probing. Bumps are formed over the interconnect bump pads. The semiconductor wafer can be sold or transferred to a third party after wafer probing without bumps.

    摘要翻译: 半导体晶片包含多个半导体管芯。 在半导体管芯上形成多个互连凸点焊盘。 多个牺牲凸块焊盘形成在相对于互连凸块焊盘附近并对角地偏移。 牺牲凸块具有与互连凸块焊盘不同的直径。 在每个互连凸块焊盘和邻近的牺牲凸块焊盘之间形成导电连接。 牺牲凸块,互连凸点焊盘和导电连接件同时或在凸块形成期间形成。 通过接触牺牲凸块来对晶片进行电测试。 电气测试识别已知的好模具和有缺陷的模具。 在晶圆探测之后,去除牺牲凸块和导电连接件的一部分。 在互连凸点焊盘上形成凸起。 半导体晶片可以在没有颠簸的晶圆探测之后出售或转移到第三方。