Microelectronic contact structure
    34.
    发明授权
    Microelectronic contact structure 有权
    微电子接触结构

    公开(公告)号:US08033838B2

    公开(公告)日:2011-10-11

    申请号:US12577444

    申请日:2009-10-12

    IPC分类号: H05K1/00

    摘要: Spring contact elements are fabricated by depositing at least one layer of metallic material into openings defined on a sacrificial substrate. The openings may be within the surface of the substrate, or in one or more layers deposited on the surface of the sacrificial substrate. Each spring contact element has a base end portion, a contact end portion, and a central body portion. The contact end portion is offset in the z-axis (at a different height) than the central body portion. The base end portion is preferably offset in an opposite direction along the z-axis from the central body portion. In this manner, a plurality of spring contact elements are fabricated in a prescribed spatial relationship with one another on the sacrificial substrate. The spring contact elements are suitably mounted by their base end portions to corresponding terminals on an electronic component, such as a space transformer or a semiconductor device, whereupon the sacrificial substrate is removed so that the contact ends of the spring contact elements extend above the surface of the electronic component. In an exemplary use, the spring contact elements are thereby disposed on a space transformer component of a probe card assembly so that their contact ends effect pressure connections to corresponding terminals on another electronic component, for the purpose of probing the electronic component.

    摘要翻译: 通过将至少一层金属材料沉积到限定在牺牲衬底上的开口中来制造弹簧接触元件。 开口可以在衬底的表面内,或者在沉积在牺牲衬底的表面上的一个或多个层中。 每个弹簧接触元件具有基端部分,接触端部分和中心体部分。 接触端部在与中心体部分相同的z轴(不同高度)偏移。 基端部优选地沿着与中心主体部分的z轴相反的方向偏移。 以这种方式,在牺牲基板上以规定的空间关系制造多个弹簧接触元件。 弹簧接触元件通过它们的基端部适当地安装在诸如空间变压器或半导体器件的电子部件上的对应端子上,从而去除牺牲基板,使得弹簧接触元件的接触端部在表面上方延伸 的电子元件。 在示例性用途中,弹簧接触元件因此被布置在探针卡组件的空间变换器部件上,使得它们的接触端在另一电子部件上实现与相应端子的压力连接,以便探测电子部件。

    SHARPENED, ORIENTED CONTACT TIP STRUCTURES
    35.
    发明申请
    SHARPENED, ORIENTED CONTACT TIP STRUCTURES 有权
    锐化,面向联系提示结构

    公开(公告)号:US20100323551A1

    公开(公告)日:2010-12-23

    申请号:US12852337

    申请日:2010-08-06

    IPC分类号: H01R11/20

    摘要: An apparatus and method providing improved interconnection elements and tip structures for effecting pressure connections between terminals of electronic components is described. The tip structure of the present invention has a sharpened blade oriented on the upper surface of the tip structure such that the length of the blade is substantially parallel to the direction of horizontal movement of the tip structure as the tip structure deflects across the terminal of an electronic component. In this manner, the sharpened substantially parallel oriented blade slices cleanly through any non-conductive layer(s) on the surface of the terminal and provides a reliable electrical connection between the interconnection element and the terminal of the electrical component.

    摘要翻译: 描述了提供改进的互连元件和尖端结构以实现电子部件的端子之间的压力连接的装置和方法。 本发明的尖端结构具有尖端结构的上表面上定向的锋利的叶片,使得叶片的长度基本上平行于尖端结构的水平移动方向,因为尖端结构偏转穿过端部 电子元件 以这种方式,锋利的基本上平行的定向叶片切片通过终端表面上的任何非导电层清洁,并且在互连元件和电气部件的端子之间提供可靠的电连接。

    Microelectronic contact structures
    36.
    发明授权
    Microelectronic contact structures 失效
    微电子接触结构

    公开(公告)号:US07798822B2

    公开(公告)日:2010-09-21

    申请号:US12511057

    申请日:2009-07-28

    IPC分类号: H01R12/00

    摘要: Microelectronic contact structures are fabricated by separately forming, then joining together, various components thereof. Each contact structure has three components: a “post” component, a “beam” component, and a “tip” component. The resulting contact structure, mounted to an electronic component, is useful for making an electrical connection with another electronic component. The post component can be fabricated on a sacrificial substrate, joined to the electronic component and its sacrificial substrate removed. Alternatively, the post component can be formed on the electronic component. The beam and tip components can each be fabricated on a sacrificial substrate. The beam component is joined to the post component and its sacrificial substrate is removed, and the tip component is joined to the beam component and its sacrificial substrate is removed.

    摘要翻译: 微电子接触结构通过分别形成,然后连接在一起而制成其各种部件。 每个接触结构具有三个部件:“后”部件,“梁”部件和“尖端”部件。 安装到电子部件上的所得接触结构对于与另一个电子部件进行电连接是有用的。 后部组件可以制造在牺牲基板上,连接到电子部件并且去除其牺牲基板。 或者,可以在电子部件上形成柱部件。 梁和尖端部件可以分别制造在牺牲衬底上。 梁组件连接到柱部件,并且其牺牲基板被移除,并且尖端部件接合到梁部件并且其牺牲基板被移除。

    Interconnection element with contact blade
    40.
    发明授权
    Interconnection element with contact blade 有权
    互连元件与接触片

    公开(公告)号:US06825422B2

    公开(公告)日:2004-11-30

    申请号:US10174455

    申请日:2002-06-17

    IPC分类号: H05K116

    摘要: An apparatus and method providing improved interconnection elements and tip structures for effecting pressure connections between terminals of electronic components is described. The tip structure of the present invention has a sharpened blade oriented on the upper surface of the tip structure such that the length of the blade is substantially parallel to the direction of horizontal movement of the tip structure as the tip structure deflects across the terminal of an electronic component. In this manner, the sharpened substantially parallel oriented blade slices cleanly through any non-conductive layer(s) on the surface of the terminal and provides a reliable electrical connection between the interconnection element and the terminal of the electrical component.

    摘要翻译: 描述了提供改进的互连元件和尖端结构以实现电子部件的端子之间的压力连接的装置和方法。 本发明的尖端结构具有尖端结构的上表面上定向的锋利的叶片,使得叶片的长度基本上平行于尖端结构的水平移动方向,因为尖端结构偏转穿过端部 电子元件 以这种方式,锋利的基本上平行的定向叶片切片通过终端表面上的任何非导电层清洁,并且在互连元件和电气部件的端子之间提供可靠的电连接。