公开(公告)号：US20130147032A1

公开(公告)日：2013-06-13

申请号：US13313747

申请日：2011-12-07

申请人： Shin-Puu JENG ,  Wei-Cheng WU ,  Shang-Yun HOU ,  Chen-Hua YU ,  Tzuan-Horng LIU ,  Tzu-Wei CHIU ,  Kuo-Ching HSU

发明人： Shin-Puu JENG ,  Wei-Cheng WU ,  Shang-Yun HOU ,  Chen-Hua YU ,  Tzuan-Horng LIU ,  Tzu-Wei CHIU ,  Kuo-Ching HSU

IPC分类号： H01L23/48 ,  H01L21/60

CPC分类号： H01L22/34 ,  G01R31/2884 ,  H01L21/76885 ,  H01L22/32 ,  H01L23/49838 ,  H01L24/11 ,  H01L24/13 ,  H01L24/16 ,  H01L2224/02126 ,  H01L2224/0401 ,  H01L2224/05001 ,  H01L2224/0554 ,  H01L2224/10126 ,  H01L2224/13005 ,  H01L2224/16225 ,  H01L2924/12044 ,  H01L2924/15311 ,  H01L2924/00

摘要： The embodiments described above provide mechanisms for forming metal bumps on metal pads with testing pads on a packaged integrated circuit (IC) chip. A passivation layer is formed to cover the testing pads and possibly portions of metal pads. The passivation layer does not cover surfaces away from the testing pad region and the metal pad region. The limited covering of the testing pads and the portions of the metal pads by the passivation layer reduces interface resistance for a UBM layer formed between the metal pads and the metal bumps. Such reduction of interface resistance leads to the reduction of resistance of the metal bumps.

摘要翻译： 上述实施例提供了在封装的集成电路（IC）芯片上用测试焊盘在金属焊盘上形成金属凸块的机构。 形成钝化层以覆盖测试焊盘和可能的金属焊盘部分。 钝化层不覆盖远离测试焊盘区域和金属焊盘区域的表面。 通过钝化层测试焊盘和金属焊盘部分的有限覆盖减少了形成在金属焊盘和金属凸块之间的UBM层的界面电阻。 这种界面电阻的降低导致金属凸块的电阻降低。

公开(公告)号：US20120206160A1

公开(公告)日：2012-08-16

申请号：US13025931

申请日：2011-02-11

申请人： Wei-Cheng WU ,  Hsien-Pin HU ,  Shang-Yun HOU ,  Shin-Puu JENG ,  Chen-Hua YU ,  Chao-Hsiang YANG

发明人： Wei-Cheng WU ,  Hsien-Pin HU ,  Shang-Yun HOU ,  Shin-Puu JENG ,  Chen-Hua YU ,  Chao-Hsiang YANG

IPC分类号： G01R31/00

CPC分类号： G01R31/2896 ,  G01R1/0416 ,  G01R31/2601 ,  G01R31/2884 ,  G01R31/2886 ,  G01R31/2889 ,  G01R31/2893 ,  H01L22/32 ,  H01L24/03 ,  H01L24/05 ,  H01L24/06 ,  H01L24/11 ,  H01L24/13 ,  H01L2224/02377 ,  H01L2224/0392 ,  H01L2224/0401 ,  H01L2224/05027 ,  H01L2224/05147 ,  H01L2224/05552 ,  H01L2224/05568 ,  H01L2224/05655 ,  H01L2224/0614 ,  H01L2224/0616 ,  H01L2224/1146 ,  H01L2224/1147 ,  H01L2224/11849 ,  H01L2224/13005 ,  H01L2224/13083 ,  H01L2224/13111 ,  H01L2224/13113 ,  H01L2224/13116 ,  H01L2224/13139 ,  H01L2224/13147 ,  H01L2224/13155 ,  H01L2224/14131 ,  H01L2224/16238 ,  H01L2924/20752 ,  H01L2924/00012 ,  H01L2924/00014 ,  H01L2924/01047 ,  H01L2924/014

摘要： Test structures for performing electrical tests of devices under one or more microbumps are provided. Each test structure includes at least one microbump pad and a test pad. The microbump pad is a part of a metal pad connected to an interconnect for a device. A width of the microbump pad is equal to or less than about 50 μm. The test pad is connected to the at least one microbump pad. The test pad has a size large enough to allow circuit probing of the device. The test pad is another part of the metal pad. A width of the test pad is greater than the at least one microbump pad.

摘要翻译： 提供用于对一个或多个微丸下的装置进行电测试的测试结构。 每个测试结构包括至少一个微型块和测试垫。 微型焊盘是与设备的互连件连接的金属焊盘的一部分。 微型焊盘的宽度等于或小于约50μm。 测试垫连接到至少一个微型块。 测试垫的尺寸足够大以允许设备的电路探测。 测试垫是金属垫的另一部分。 测试垫的宽度大于至少一个微小块垫。

公开(公告)号：US20110291288A1

公开(公告)日：2011-12-01

申请号：US12787661

申请日：2010-05-26

申请人： Wei-Cheng WU ,  Shang-Yun HOU ,  Shin-Puu JENG ,  Chen-Hua YU

发明人： Wei-Cheng WU ,  Shang-Yun HOU ,  Shin-Puu JENG ,  Chen-Hua YU

IPC分类号： H01L23/538

CPC分类号： H01L23/49827 ,  H01L21/486 ,  H01L21/565 ,  H01L21/76877 ,  H01L21/76895 ,  H01L23/3128 ,  H01L23/49816 ,  H01L23/49833 ,  H01L24/11 ,  H01L24/17 ,  H01L24/81 ,  H01L25/0652 ,  H01L25/0655 ,  H01L25/0657 ,  H01L25/50 ,  H01L2224/05573 ,  H01L2224/11002 ,  H01L2224/16146 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2225/06517 ,  H01L2225/06541 ,  H01L2225/06548 ,  H01L2225/06572 ,  H01L2924/01019 ,  H01L2924/10253 ,  H01L2924/1305 ,  H01L2924/13091 ,  H01L2924/14 ,  H01L2924/15311 ,  H01L2924/381 ,  H01L2924/00 ,  H01L2224/05624 ,  H01L2924/00014 ,  H01L2224/05647 ,  H01L2224/05655 ,  H01L2224/05666 ,  H01L2224/05681 ,  H01L2224/05684

摘要： A package system includes an integrated circuit disposed over an interposer. The interposer includes a first interconnect structure. A first substrate is disposed over the first interconnect structure. The first substrate includes at least one first through silicon via (TSV) structure therein. A molding compound material is disposed over the first interconnect structure and around the first substrate. The integrated circuit is electrically coupled with the at least one first TSV structure.

摘要翻译： 封装系统包括设置在插入件上的集成电路。 插入器包括第一互连结构。 第一衬底设置在第一互连结构之上。 第一衬底包括其中的至少一个第一至硅通孔（TSV）结构。 模制复合材料设置在第一互连结构上并且围绕第一基板。 集成电路与至少一个第一TSV结构电耦合。

公开(公告)号：US20110027944A1

公开(公告)日：2011-02-03

申请号：US12768025

申请日：2010-04-27

申请人： Chung-Shi LIU ,  Shin-Puu JENG ,  Mirng-Ji LII ,  Chen-Hua YU

发明人： Chung-Shi LIU ,  Shin-Puu JENG ,  Mirng-Ji LII ,  Chen-Hua YU

IPC分类号： H01L21/768 ,  H01L21/56

CPC分类号： H01L23/3171 ,  H01L21/563 ,  H01L23/525 ,  H01L24/11 ,  H01L24/13 ,  H01L24/16 ,  H01L2224/10126 ,  H01L2224/1147 ,  H01L2224/1308 ,  H01L2224/13082 ,  H01L2224/13111 ,  H01L2224/13144 ,  H01L2224/13147 ,  H01L2224/13155 ,  H01L2224/13164 ,  H01L2224/73203 ,  H01L2924/00013 ,  H01L2924/01006 ,  H01L2924/01019 ,  H01L2924/01029 ,  H01L2924/01032 ,  H01L2924/01033 ,  H01L2924/01046 ,  H01L2924/01075 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/10329 ,  H01L2924/14 ,  H01L2924/19041 ,  H01L2924/00014 ,  H01L2224/13099

摘要： A method of forming electrical connections to a semiconductor wafer. A semiconductor wafer comprising an insulation layer is provided. The insulation layer has a surface. A patterned mask layer is formed over the surface of the insulation layer. The patterned mask layer exposes portions of the surface of the insulation layer through a plurality of holes. The portions of the plurality of holes are filled with a metal material comprising copper to form elongated columns of the metal material. The elongated columns of the metal material have a sidewall surface. The patterned mask layer is removed to expose the sidewall surface of the elongated columns of the metal material. A protection layer is formed on the exposed sidewall surface of the elongated columns of the metal material.

摘要翻译： 形成与半导体晶片的电连接的方法。 提供了包括绝缘层的半导体晶片。 绝缘层具有表面。 在绝缘层的表面上形成图案化掩模层。 图案化掩模层通过多个孔暴露绝缘层的表面的部分。 多个孔的部分填充有包含铜的金属材料以形成细长的金属材料柱。 金属材料的细长柱具有侧壁表面。 去除图案化的掩模层以暴露金属材料的细长柱的侧壁表面。 保护层形成在金属材料的细长柱的暴露的侧壁表面上。

公开(公告)号：US20130087908A1

公开(公告)日：2013-04-11

申请号：US13267200

申请日：2011-10-06

申请人： Chen-Hua YU ,  Hung-Pin CHANG ,  An-Jhih SU ,  Tsang-Jiuh WU ,  Wen-Chih CHIOU ,  Shin-Puu JENG

发明人： Chen-Hua YU ,  Hung-Pin CHANG ,  An-Jhih SU ,  Tsang-Jiuh WU ,  Wen-Chih CHIOU ,  Shin-Puu JENG

IPC分类号： H01L23/498

CPC分类号： H01L23/293 ,  H01L23/3192 ,  H01L24/01 ,  H01L24/03 ,  H01L24/05 ,  H01L24/11 ,  H01L24/13 ,  H01L2224/0345 ,  H01L2224/03452 ,  H01L2224/0346 ,  H01L2224/03912 ,  H01L2224/0401 ,  H01L2224/05008 ,  H01L2224/05022 ,  H01L2224/05124 ,  H01L2224/05147 ,  H01L2224/05155 ,  H01L2224/05571 ,  H01L2224/05573 ,  H01L2224/05582 ,  H01L2224/05647 ,  H01L2224/05666 ,  H01L2224/05681 ,  H01L2224/05686 ,  H01L2224/10126 ,  H01L2224/11334 ,  H01L2224/1146 ,  H01L2224/1147 ,  H01L2224/11849 ,  H01L2224/13006 ,  H01L2224/13007 ,  H01L2224/13018 ,  H01L2224/13022 ,  H01L2224/13082 ,  H01L2224/13111 ,  H01L2224/13113 ,  H01L2224/13116 ,  H01L2224/13139 ,  H01L2224/13147 ,  H01L2224/13155 ,  H01L2924/00014 ,  H01L2924/01029 ,  H01L2924/10253 ,  H01L2924/15788 ,  H01L2924/014 ,  H01L2924/00012 ,  H01L2924/04941 ,  H01L2924/01047 ,  H01L2924/01024 ,  H01L2924/01028 ,  H01L2924/0105 ,  H01L2924/01079 ,  H01L2924/00 ,  H01L2224/05552

摘要： A semiconductor device includes a bump structure formed on a post-passivation interconnect (PPI) line and surrounded by a protection structure. The protection structure includes a polymer layer and at least one dielectric layer. The dielectric layer may be formed on the top surface of the polymer layer, underlying the polymer layer, inserted between the bump structure and the polymer layer, inserted between the PPI line and the polymer layer, covering the exterior sidewalls of the polymer layer, or combinations thereof.

摘要翻译： 半导体器件包括形成在钝化后互连（PPI）线上并由保护结构包围的凸块结构。 保护结构包括聚合物层和至少一个电介质层。 电介质层可以形成在聚合物层的顶表面上，该聚合物层的下面，插入凸起结构和聚合物层之间，插入在PPI线和聚合物层之间，覆盖聚合物层的外侧壁，或 其组合。

公开(公告)号：US20130026620A1

公开(公告)日：2013-01-31

申请号：US13192756

申请日：2011-07-28

申请人： Cheng-Lin HUANG ,  I-Ting CHEN ,  Ying Ching SHIH ,  Po-Hao TSAI ,  Szu Wei LU ,  Jing-Cheng LIN ,  Shin-Puu JENG ,  Chen-Hua YU

发明人： Cheng-Lin HUANG ,  I-Ting CHEN ,  Ying Ching SHIH ,  Po-Hao TSAI ,  Szu Wei LU ,  Jing-Cheng LIN ,  Shin-Puu JENG ,  Chen-Hua YU

IPC分类号： H01L23/498 ,  H01L21/60

CPC分类号： H01L24/14 ,  H01L23/49811 ,  H01L24/11 ,  H01L24/13 ,  H01L24/17 ,  H01L24/81 ,  H01L2224/0346 ,  H01L2224/03912 ,  H01L2224/0401 ,  H01L2224/1146 ,  H01L2224/11462 ,  H01L2224/11472 ,  H01L2224/1161 ,  H01L2224/11622 ,  H01L2224/13011 ,  H01L2224/13014 ,  H01L2224/13078 ,  H01L2224/13111 ,  H01L2224/13139 ,  H01L2224/13144 ,  H01L2224/13147 ,  H01L2224/1403 ,  H01L2224/1405 ,  H01L2224/14051 ,  H01L2224/145 ,  H01L2224/16238 ,  H01L2224/17107 ,  H01L2224/81141 ,  H01L2224/81193 ,  H01L2224/81815 ,  H01L2224/81897 ,  H01L2924/1305 ,  H01L2924/1306 ,  H01L2924/00014 ,  H01L2924/01047 ,  H01L2924/01082 ,  H01L2924/01029 ,  H01L2924/0103 ,  H01L2924/01083 ,  H01L2924/01053 ,  H01L2924/01079 ,  H01L2924/01051 ,  H01L2924/014 ,  H01L2924/00012 ,  H01L2924/00

摘要： The disclosure relates to a conductive bump structure of a semiconductor device. An exemplary structure for a semiconductor device comprises a substrate comprising a major surface and conductive bumps distributed over the major surface of the substrate. Each of a first subset of the conductive bumps comprise a regular body, and each of a second subset of the conductive bumps comprise a ring-shaped body.

摘要翻译： 本发明涉及半导体器件的导电凸块结构。 半导体器件的示例性结构包括包括主表面的衬底和分布在衬底的主表面上的导电凸块。 导电凸块的第一子集中的每一个包括规则体，并且导电凸块的第二子集中的每一个包括环形体。

公开(公告)号：US20100330788A1

公开(公告)日：2010-12-30

申请号：US12818362

申请日：2010-06-18

申请人： Chen-Hua YU ,  Kuo-Ching HSU ,  Chen-Shien CHEN ,  Ching-Wen HSIAO

发明人： Chen-Hua YU ,  Kuo-Ching HSU ,  Chen-Shien CHEN ,  Ching-Wen HSIAO

IPC分类号： H01L21/265 ,  H01L21/26 ,  H01L21/306 ,  H01L21/3205 ,  B32B7/12 ,  C23C14/34 ,  B24B1/00

CPC分类号： H01L21/187 ,  H01L21/6835 ,  H01L2221/68318 ,  H01L2221/68327 ,  H01L2221/68381 ,  Y10T428/1476

摘要： A thin wafer handling structure includes a semiconductor wafer, a release layer that can be released by applying energy, an adhesive layer that can be removed by a solvent, and a carrier, where the release layer is applied on the carrier by coating or laminating, the adhesive layer is applied on the semiconductor wafer by coating or laminating, and the semiconductor wafer and the carrier is bonded together with the release layer and the adhesive layer in between. The method includes applying a release layer on a carrier, applying an adhesive layer on a semiconductor wafer, bonding the carrier and the semiconductor wafer, releasing the carrier by applying energy on the release layer, e.g. UV or laser, and cleaning the semiconductor's surface by a solvent to remove any residue of the adhesive layer.

摘要翻译： 薄晶片处理结构包括半导体晶片，可通过施加能量释放的释放层，可通过溶剂除去的粘合剂层和载体，其中通过涂覆或层压将剥离层施加在载体上， 通过涂布或层压将粘合剂层施加在半导体晶片上，半导体晶片和载体与剥离层和粘合剂层粘合在一起。 该方法包括在载体上施加剥离层，在半导体晶片上施加粘合剂层，粘合载体和半导体晶片，通过在释放层上施加能量来释放载体，例如， UV或激光，并且通过溶剂清洁半导体的表面以除去粘合剂层的任何残余物。

公开(公告)号：US20110285005A1

公开(公告)日：2011-11-24

申请号：US12781960

申请日：2010-05-18

申请人： Yung-Chi LIN ,  Jing-Cheng LIN ,  Chen-Hua YU

发明人： Yung-Chi LIN ,  Jing-Cheng LIN ,  Chen-Hua YU

IPC分类号： H01L23/538

CPC分类号： H01L21/4857 ,  H01L21/4846 ,  H01L21/4853 ,  H01L21/486 ,  H01L21/56 ,  H01L21/563 ,  H01L21/565 ,  H01L21/6835 ,  H01L21/768 ,  H01L23/295 ,  H01L23/3128 ,  H01L23/49816 ,  H01L23/49822 ,  H01L23/49827 ,  H01L23/5389 ,  H01L24/03 ,  H01L24/11 ,  H01L24/19 ,  H01L24/24 ,  H01L25/0657 ,  H01L25/50 ,  H01L2221/68359 ,  H01L2224/02331 ,  H01L2224/02372 ,  H01L2224/0239 ,  H01L2224/0401 ,  H01L2224/12105 ,  H01L2224/16225 ,  H01L2224/24227 ,  H01L2224/32225 ,  H01L2224/73203 ,  H01L2224/73204 ,  H01L2225/06517 ,  H01L2225/06548 ,  H01L2225/06572 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01019 ,  H01L2924/0102 ,  H01L2924/01023 ,  H01L2924/01024 ,  H01L2924/01029 ,  H01L2924/01032 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01049 ,  H01L2924/01059 ,  H01L2924/01073 ,  H01L2924/01074 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/01327 ,  H01L2924/10253 ,  H01L2924/10329 ,  H01L2924/12042 ,  H01L2924/1305 ,  H01L2924/13091 ,  H01L2924/14 ,  H01L2924/15192 ,  H01L2924/15311 ,  H01L2924/15788 ,  H01L2924/181 ,  H01L2924/00012 ,  H01L2924/00

摘要： A package system includes a first integrated circuit disposed over an interposer. The interposer includes at least one molding compound layer including a plurality of electrical connection structures through the at least one molding compound layer. A first interconnect structure is disposed over a first surface of the at least one molding compound layer and electrically coupled with the plurality of electrical connection structures. The first integrated circuit is electrically coupled with the first interconnect structure.

摘要翻译： 封装系统包括设置在插入器上的第一集成电路。 所述插入器包括至少一个包含穿过所述至少一个模塑复合层的多个电连接结构的模塑复合层。 第一互连结构设置在至少一个模塑复合层的第一表面上并与多个电连接结构电耦合。 第一集成电路与第一互连结构电耦合。

公开(公告)号：US20110001250A1

公开(公告)日：2011-01-06

申请号：US12825822

申请日：2010-06-29

申请人： Jing-Cheng LIN ,  Chen-Hua YU

发明人： Jing-Cheng LIN ,  Chen-Hua YU

IPC分类号： H01L23/488 ,  B05D5/12 ,  B32B3/00

CPC分类号： H01L23/49816 ,  H01L24/11 ,  H01L24/13 ,  H01L24/16 ,  H01L24/81 ,  H01L2224/11462 ,  H01L2224/1147 ,  H01L2224/11901 ,  H01L2224/1308 ,  H01L2224/13084 ,  H01L2224/13147 ,  H01L2224/13583 ,  H01L2224/13611 ,  H01L2224/13655 ,  H01L2224/16 ,  H01L2224/81191 ,  H01L2224/81193 ,  H01L2224/81801 ,  H01L2924/00013 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01019 ,  H01L2924/01022 ,  H01L2924/01023 ,  H01L2924/01029 ,  H01L2924/0103 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01049 ,  H01L2924/0105 ,  H01L2924/01074 ,  H01L2924/01075 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/01327 ,  H01L2924/014 ,  H01L2924/14 ,  H01L2924/1461 ,  Y10T428/24612 ,  H01L2924/00014 ,  H01L2924/01083 ,  H01L2924/01015 ,  H01L2224/13099 ,  H01L2924/00 ,  H01L2224/1146

摘要： A method and structure for good adhesion of Intermetallic Compounds (IMC) on Cu pillar bumps are provided. The method includes depositing Cu to form a Cu pillar layer, depositing a diffusion barrier layer on top of the Cu pillar layer, and depositing a Cu cap layer on top of the diffusion barrier layer, where an intermetallic compound (IMC) is formed among the diffusion barrier layer, the Cu cap layer, and a solder layer placed on top of the Cu cap layer. The IMC has good adhesion on the Cu pillar structure, the thickness of the IMC is controllable by the thickness of the Cu cap layer, and the diffusion barrier layer limits diffusion of Cu from the Cu pillar layer to the solder layer. The method can further include depositing a thin layer for wettability on top of the diffusion barrier layer prior to depositing the Cu cap layer.

摘要翻译： 提供了一种用于金属间化合物（IMC）对Cu柱凸块的良好粘附的方法和结构。 该方法包括沉积Cu以形成Cu柱层，在Cu柱层的顶部上沉积扩散阻挡层，并在扩散阻挡层的顶部上沉积Cu覆盖层，其中形成金属间化合物（IMC） 扩散阻挡层，Cu覆盖层和位于Cu覆盖层顶部的焊料层。 IMC对Cu柱结构具有良好的粘附性，IMC的厚度可由Cu覆盖层的厚度控制，扩散阻挡层限制Cu从Cu柱层到焊料层的扩散。 该方法可以进一步包括在沉积Cu覆盖层之前在扩散阻挡层的顶部沉积薄层以获得润湿性。

公开(公告)号：US20100072632A1

公开(公告)日：2010-03-25

申请号：US12233974

申请日：2008-09-19

申请人： Chen-Hua YU ,  Tien-I BAO

发明人： Chen-Hua YU ,  Tien-I BAO

IPC分类号： H01L23/48 ,  H01L21/44

CPC分类号： H01L24/05 ,  H01L23/5226 ,  H01L24/06 ,  H01L24/45 ,  H01L2224/04042 ,  H01L2224/05093 ,  H01L2224/05097 ,  H01L2224/05624 ,  H01L2224/05644 ,  H01L2224/05647 ,  H01L2224/05655 ,  H01L2224/05666 ,  H01L2224/05681 ,  H01L2224/05684 ,  H01L2224/45124 ,  H01L2224/45144 ,  H01L2224/48624 ,  H01L2224/48644 ,  H01L2224/48647 ,  H01L2224/48655 ,  H01L2224/48666 ,  H01L2224/48684 ,  H01L2224/48724 ,  H01L2224/48747 ,  H01L2224/48755 ,  H01L2224/48766 ,  H01L2224/48784 ,  H01L2224/48844 ,  H01L2224/48847 ,  H01L2224/48855 ,  H01L2224/48866 ,  H01L2224/48881 ,  H01L2224/48884 ,  H01L2224/85205 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01019 ,  H01L2924/01022 ,  H01L2924/01028 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/0105 ,  H01L2924/01073 ,  H01L2924/01074 ,  H01L2924/01079 ,  H01L2924/04941 ,  H01L2924/04953 ,  H01L2924/14 ,  H01L2924/19043 ,  H01L2924/351 ,  H01L2924/00014 ,  H01L2224/45147 ,  H01L2924/00 ,  H01L2224/48824 ,  H01L2224/48744 ,  H01L2224/48781 ,  H01L2224/48681

摘要： A semiconductor structure is provided. In one embodiment, a bond pad is formed above one or more underlying layers of a substrate. A plurality of dummy plugs are spaced around the bond pad, the plurality of dummy plugs substantially vertically traversing the one or more underlying layers, wherein the plurality of dummy plugs anchor at least two of the underlying layers together to achieve improved mechanical strength.

摘要翻译： 提供半导体结构。 在一个实施例中，在衬底的一个或多个下层上方形成接合焊盘。 多个虚拟插头围绕接合焊盘间隔开，多个虚拟插头基本垂直地穿过一个或多个下层，其中多个虚拟插头将至少两个下面的层固定在一起以实现改进的机械强度。