FINE PITCH MICROELECTRONIC CONTACT ARRAY AND METHOD OF MAKING SAME
    4.
    发明申请
    FINE PITCH MICROELECTRONIC CONTACT ARRAY AND METHOD OF MAKING SAME 有权
    精细微电子接触阵列及其制造方法

    公开(公告)号:US20140232427A1

    公开(公告)日:2014-08-21

    申请号:US13511137

    申请日:2011-11-09

    IPC分类号: G01R1/067 H05K13/00 G01R1/073

    摘要: Provided are microfabricated probe elements, including elastomer elements, and methods of making the same, that can be readily used with fine pitch microelectronic arrays, for instance by providing sufficient compliance in a small package, while minimizing deflection forces, and while precisely maintaining the planarity and positioning of the contact tips across vast grid arrays. Elastomer elements may be generated using photolithography, either directly or through a sacrificial lost-mold process. Elastomer probe elements are provided with rigid tip structures microfabricated thereon to improve contact pressure. A novel space transformation probe card assembly is also provided.

    摘要翻译: 提供了微制造的探针元件,包括弹性体元件及其制造方法,其可以容易地与细间距微电子阵列一起使用,例如通过在小封装中提供足够的柔量,同时最小化偏转力,同时精确地保持平面度 并将接触尖端定位在广泛的网格阵列上。 弹性体元件可以使用光刻技术直接地或通过牺牲损失模具工艺来产生。 弹性体探针元件设置有微加工在其上的刚性尖端结构以改善接触压力。 还提供了一种新颖的空间转换探针卡组件。