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1.ELECTRONICS PACKAGE HAVING A MULTI-THICKNESS CONDUCTOR LAYER AND METHOD OF MANUFACTURING THEREOF 审中-公开
Title translation: 具有多厚导线层的电子装置及其制造方法公开(公告)号:WO2018085020A1
公开(公告)日:2018-05-11
申请号:PCT/US2017/056362
申请日:2017-10-12
Applicant: GENERAL ELECTRIC COMPANY
Inventor: TUOMINEN, Risto, Ilkka , GOWDA, Arun, Virupaksha
CPC classification number: H01L25/50 , H01L21/4853 , H01L21/4857 , H01L21/486 , H01L23/3121 , H01L23/49811 , H01L23/49827 , H01L23/49844 , H01L23/5383 , H01L23/5384 , H01L23/5387 , H01L24/13 , H01L24/16 , H01L24/19 , H01L24/24 , H01L24/32 , H01L24/73 , H01L24/81 , H01L24/82 , H01L24/83 , H01L24/92 , H01L24/97 , H01L25/0657 , H01L25/16 , H01L25/18 , H01L2224/0401 , H01L2224/04105 , H01L2224/06181 , H01L2224/08235 , H01L2224/12105 , H01L2224/131 , H01L2224/1329 , H01L2224/13339 , H01L2224/16235 , H01L2224/16238 , H01L2224/291 , H01L2224/29139 , H01L2224/2919 , H01L2224/32225 , H01L2224/32245 , H01L2224/73253 , H01L2224/73267 , H01L2224/81801 , H01L2224/8184 , H01L2224/82031 , H01L2224/82039 , H01L2224/82047 , H01L2224/8309 , H01L2224/83091 , H01L2224/83191 , H01L2224/83192 , H01L2224/83851 , H01L2224/83862 , H01L2224/83865 , H01L2224/83874 , H01L2224/92144 , H01L2224/9222 , H01L2224/92225 , H01L2224/97 , H01L2225/06517 , H01L2225/06541 , H01L2225/06555 , H01L2924/10253 , H01L2924/10272 , H01L2924/10329 , H01L2924/1033 , H01L2924/1302 , H01L2924/13023 , H01L2924/13034 , H01L2924/1305 , H01L2924/13055 , H01L2924/13091 , H01L2924/143 , H01L2924/1431 , H01L2924/1433 , H01L2924/1434 , H01L2924/15311 , H01L2924/15313 , H01L2924/19041 , H01L2924/19042 , H01L2924/19043 , H01L2924/19105 , H01L2924/014 , H01L2924/00014 , H01L2224/81 , H01L2224/83 , H01L2224/82
Abstract: An electronics package includes an insulating substrate (106), a first electrical component (104) coupled to a first surface of the insulating substrate, and a first conductor layer (108) formed on the first surface of the insulating substrate. A second conductor layer (128) is formed on a second surface of the insulating substrate, opposite the first surface, the second conductor layer extending through vias (124,126) in the insulating substrate to contact at least one contact pad (122) of the first electrical component and couple with the first conductor layer. The electronics package also includes a second electrical component (102) having at least one contact pad (142) coupled to the first conductor layer. The first conductor layer has a thickness greater than a thickness of the second conductor layer.
Abstract translation: 一种电子器件封装包括绝缘基板(106),耦合到绝缘基板的第一表面的第一电气部件(104)和形成在绝缘基板的第一表面上的第一导体层(108) 绝缘基板。 第二导体层(128)形成在绝缘基板的与第一表面相对的第二表面上,第二导体层延伸穿过绝缘基板中的通孔(124,126)以接触第一导体层的至少一个接触垫(122) 电部件并与第一导体层耦合。 该电子封装还包括具有耦合到第一导体层的至少一个接触焊盘(142)的第二电气部件(102)。 第一导体层的厚度大于第二导体层的厚度。 p>
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公开(公告)号:WO2017011228A1
公开(公告)日:2017-01-19
申请号:PCT/US2016/041000
申请日:2016-07-05
Applicant: INVENSAS CORPORATION
Inventor: UZOH, Cyprian, Emeka
IPC: H01L23/00 , H01L23/12 , H01L21/324 , H01L23/485
CPC classification number: H01L24/17 , H01L21/4853 , H01L23/49811 , H01L23/49816 , H01L23/49838 , H01L24/11 , H01L24/13 , H01L24/16 , H01L24/81 , H01L24/83 , H01L25/0657 , H01L25/50 , H01L2224/03009 , H01L2224/03912 , H01L2224/0401 , H01L2224/05124 , H01L2224/05144 , H01L2224/05155 , H01L2224/05568 , H01L2224/05647 , H01L2224/11442 , H01L2224/1145 , H01L2224/11452 , H01L2224/1146 , H01L2224/11462 , H01L2224/11464 , H01L2224/1147 , H01L2224/11614 , H01L2224/1162 , H01L2224/1182 , H01L2224/13083 , H01L2224/13109 , H01L2224/13111 , H01L2224/13124 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13155 , H01L2224/13184 , H01L2224/13309 , H01L2224/13311 , H01L2224/13313 , H01L2224/13339 , H01L2224/13344 , H01L2224/13355 , H01L2224/13409 , H01L2224/13561 , H01L2224/1357 , H01L2224/13809 , H01L2224/13811 , H01L2224/13813 , H01L2224/13839 , H01L2224/13844 , H01L2224/13855 , H01L2224/1601 , H01L2224/16058 , H01L2224/16059 , H01L2224/16104 , H01L2224/16113 , H01L2224/16145 , H01L2224/16227 , H01L2224/16238 , H01L2224/16501 , H01L2224/81193 , H01L2224/81204 , H01L2224/81801 , H01L2224/8184 , H01L2224/83815 , H01L2924/01013 , H01L2924/01028 , H01L2924/01029 , H01L2924/01047 , H01L2924/0105 , H01L2924/01079 , H01L2924/014 , H01L2924/2064 , H01L2924/3511 , H01L2924/3841 , H01L2924/013
Abstract: A method of making an assembly can include forming a first conductive element at a first surface of a substrate of a first component, forming conductive nanoparticles at a surface of the conductive element by exposure to an electroless plating bath, juxtaposing the surface of the first conductive element with a corresponding surface of a second conductive element at a major surface of a substrate of a second component, and elevating a temperature at least at interfaces of the juxtaposed first and second conductive elements to a joining temperature at which the conductive nanoparticles cause metallurgical joints to form between the juxtaposed first and second conductive elements. The conductive nanoparticles can be disposed between the surfaces of the first and second conductive elements. The conductive nanoparticles can have long dimensions smaller than 100 nanometers.
Abstract translation: 制造组件的方法可以包括在第一部件的基板的第一表面处形成第一导电元件,通过暴露于化学镀浴,在导电元件的表面上形成导电纳米颗粒,并置第一导电的表面 元件,其具有在第二部件的基板的主表面处的第二导电元件的对应表面,并且至少在并置的第一和第二导电元件的界面处将温度升高到导电纳米颗粒引起冶金接头的接合温度 在并置的第一和第二导电元件之间形成。 导电纳米颗粒可以设置在第一和第二导电元件的表面之间。 导电纳米颗粒可以具有小于100纳米的长尺寸。
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3.INTEGRATED CIRCUIT ASSEMBLIES WITH REINFORCEMENT FRAMES, AND METHODS OF MANUFACTURE 审中-公开
Title translation: 具有加强框架的集成电路组件及其制造方法公开(公告)号:WO2015183884A2
公开(公告)日:2015-12-03
申请号:PCT/US2015/032572
申请日:2015-05-27
Applicant: INVENSAS CORPORATION
IPC: H01L23/04
CPC classification number: H01L23/562 , H01L21/561 , H01L21/78 , H01L21/784 , H01L22/32 , H01L23/04 , H01L23/10 , H01L23/147 , H01L23/3121 , H01L23/3135 , H01L23/367 , H01L23/3675 , H01L23/49827 , H01L23/49838 , H01L24/05 , H01L24/06 , H01L24/09 , H01L24/13 , H01L24/14 , H01L24/16 , H01L24/17 , H01L24/32 , H01L24/73 , H01L24/83 , H01L24/92 , H01L24/94 , H01L24/97 , H01L25/0652 , H01L25/0655 , H01L25/0657 , H01L25/18 , H01L25/50 , H01L2224/0401 , H01L2224/05568 , H01L2224/05569 , H01L2224/0603 , H01L2224/06181 , H01L2224/131 , H01L2224/1403 , H01L2224/14181 , H01L2224/16145 , H01L2224/16225 , H01L2224/16238 , H01L2224/17181 , H01L2224/32145 , H01L2224/32225 , H01L2224/32245 , H01L2224/73204 , H01L2224/73253 , H01L2224/83192 , H01L2224/92125 , H01L2224/92225 , H01L2224/94 , H01L2224/97 , H01L2225/06513 , H01L2225/06517 , H01L2225/06541 , H01L2225/06548 , H01L2225/06586 , H01L2225/06589 , H01L2225/06596 , H01L2924/12042 , H01L2924/15192 , H01L2924/15311 , H01L2924/1615 , H01L2924/16152 , H01L2924/16153 , H01L2924/16176 , H01L2924/16235 , H01L2924/16251 , H01L2924/1632 , H01L2924/164 , H01L2924/167 , H01L2924/16788 , H01L2924/1679 , H01L2924/181 , H01L2924/351 , H01L2924/3511 , H01L2224/81 , H01L2224/83 , H01L2924/014 , H01L2924/00 , H01L2924/00012
Abstract: An assembly with modules (110, 1310) containing integrated circuits and attached to a wiring substrate (120) is reinforced by one or more reinforcement frames (410) attached to the wiring substrate. The modules are located in openings (e.g. cavities and/or through-holes 414) in the reinforcement frame. Other features are also provided.
Abstract translation: 包含集成电路并附接到布线基板(120)的模块(110,1310)的组件由附接到布线基板的一个或多个加强框架(410)加强。 模块位于加强框架中的开口(例如空腔和/或通孔414)中。 还提供其他功能。
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公开(公告)号:WO2015159566A1
公开(公告)日:2015-10-22
申请号:PCT/JP2015/052000
申请日:2015-01-26
Applicant: オリンパス株式会社
Inventor: 小島 一哲
CPC classification number: H01L24/16 , H01L21/4857 , H01L23/49822 , H01L23/49833 , H01L23/4985 , H01L23/49894 , H01L24/75 , H01L24/81 , H01L27/14636 , H01L2224/13111 , H01L2224/13118 , H01L2224/13124 , H01L2224/13139 , H01L2224/13147 , H01L2224/16238 , H01L2224/50 , H01L2224/81193 , H01L2224/81203 , H01L2224/81801 , H01L2924/014 , H01L2924/12043 , H05K3/363 , H05K3/4691 , H05K2201/068
Abstract: 半導体モジュール1は、複数のバンプ13が列設された撮像素子10と、前記複数のバンプ13のそれぞれに、それぞれの先端部の接合電極26が半田接合された複数の配線24を有する可撓性樹脂を基体23とするフレキシブル配線板20と、を具備し、半田接合温度への加熱により前記配線板20が湾曲変形することによって、接合電極26がバンプ13に圧接される。
Abstract translation: 半导体模块(1)设置有:具有多个设置成一排的凸块(13)的图像拾取元件(10); 以及柔性布线板(20),其具有作为基体(23)的柔性树脂,所述柔性树脂具有多个布线(24),所述布线分别在其前端部分接合到所述凸块(13)上的接合电极(26) )使用焊料。 接线板(20)通过加热到焊接接合温度而弯曲变形,从而将接合电极(26)加压焊接到凸块(13)。
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公开(公告)号:WO2015141343A1
公开(公告)日:2015-09-24
申请号:PCT/JP2015/053957
申请日:2015-02-13
Applicant: デクセリアルズ株式会社
IPC: C09J201/00 , C09J9/02 , C09J11/04 , H01B1/00 , H01B1/22 , H01B5/16 , H01L21/60 , H05K1/18 , H05K3/32 , H05K3/34
CPC classification number: C09J9/02 , C08K3/22 , C08K7/16 , C08K9/02 , C08K2003/0806 , C08K2003/2241 , C08K2201/001 , C08K2201/003 , C08K2201/005 , C09J11/04 , C09J163/00 , C09J201/00 , H01B1/22 , H01L24/29 , H01L24/81 , H01L24/83 , H01L33/60 , H01L33/62 , H01L33/641 , H01L33/644 , H01L33/647 , H01L2224/16238 , H01L2224/2929 , H01L2224/293 , H01L2224/29386 , H01L2224/2939 , H01L2224/29439 , H01L2224/29499 , H01L2224/32225 , H01L2224/48091 , H01L2224/48227 , H01L2224/49107 , H01L2224/73204 , H01L2224/73265 , H01L2224/81193 , H01L2224/81194 , H01L2224/81203 , H01L2933/0066 , H01L2933/0075 , H05K3/323 , H05K2201/0221 , H05K2201/0272 , H05K2201/10106 , H05K2201/2054 , H01L2924/00014 , H01L2224/16225 , H01L2924/00 , H01L2924/014 , H01L2924/05341 , H01L2924/05432
Abstract: 優れた光学特性及び放熱特性が得られる異方性導電接着剤を提供する。樹脂粒子の最表面にAgを主成分とする金属層が形成された導電性粒子(31)と、導電性粒子よりも平均粒径が小さいはんだ粒子(32)と、はんだ粒子よりも平均粒径が小さい光反射性絶縁粒子と、導電性粒子(31)、はんだ粒子(32)、及び光反射性絶縁粒子を分散させるバインダーとを含有する。導電性粒子及び光反射性絶縁粒子が、光を効率よく反射し、LED実装体の光取り出し効率を向上させる。また、圧着時にはんだ粒子(32)が端子間をはんだ接合するため、対向する端子間の接触面積が増加し、高い放熱特性が得られる。
Abstract translation: 提供能够实现优异的光学特性和优异的散热特性的各向异性导电粘合剂。 该各向异性导电粘合剂含有:导电粒子(31),其通过在树脂粒子的最外表面上形成主要由Ag构成的金属层而得到, 具有比导电性粒子小的平均粒径的焊料粒子(32) 具有比焊料颗粒更小的平均粒径的光反射绝缘颗粒; 和导电粒子(31),焊料粒子(32)和光反射绝缘粒子分散的粘合剂。 导电粒子和光反射绝缘粒子有效地反射光,从而提高LED封装的光提取效率。 此外,由于端子在压接期间通过焊料颗粒(32)焊接在一起,所以彼此面对的端子之间的接触面积增加,从而能够实现高的散热特性。
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公开(公告)号:WO2015136821A1
公开(公告)日:2015-09-17
申请号:PCT/JP2014/084492
申请日:2014-12-26
Applicant: 学校法人慶應義塾
Inventor: 黒田 忠広
IPC: H01L21/3205 , H01L21/768 , H01L23/522 , H01L25/065 , H01L25/07 , H01L25/18
CPC classification number: H01L25/0652 , H01L21/486 , H01L21/6835 , H01L21/76898 , H01L23/481 , H01L23/5383 , H01L23/5384 , H01L23/5389 , H01L23/645 , H01L24/05 , H01L24/06 , H01L24/08 , H01L24/09 , H01L24/16 , H01L24/17 , H01L24/18 , H01L24/29 , H01L24/32 , H01L24/45 , H01L24/48 , H01L24/73 , H01L24/80 , H01L24/81 , H01L24/83 , H01L24/92 , H01L24/94 , H01L25/0657 , H01L25/18 , H01L25/50 , H01L27/0688 , H01L27/092 , H01L2221/68327 , H01L2221/6834 , H01L2224/02372 , H01L2224/02375 , H01L2224/02377 , H01L2224/02379 , H01L2224/03002 , H01L2224/0401 , H01L2224/04042 , H01L2224/05009 , H01L2224/0557 , H01L2224/05624 , H01L2224/05647 , H01L2224/06181 , H01L2224/08146 , H01L2224/16145 , H01L2224/16227 , H01L2224/16238 , H01L2224/17181 , H01L2224/2919 , H01L2224/32145 , H01L2224/32225 , H01L2224/45015 , H01L2224/45144 , H01L2224/48091 , H01L2224/48227 , H01L2224/73204 , H01L2224/73253 , H01L2224/73257 , H01L2224/80006 , H01L2224/80203 , H01L2224/8083 , H01L2224/80986 , H01L2224/81005 , H01L2224/9202 , H01L2224/92125 , H01L2224/9222 , H01L2224/92225 , H01L2224/92227 , H01L2224/94 , H01L2225/0651 , H01L2225/06513 , H01L2225/06517 , H01L2225/06541 , H01L2225/06558 , H01L2225/06565 , H01L2924/00014 , H01L2924/13091 , H01L2924/14 , H01L2924/1434 , H01L2924/19107 , H01L2224/80 , H01L2224/03 , H01L2924/00 , H01L2224/80001 , H01L2224/83 , H01L2224/85 , H01L2224/81 , H01L2924/20752
Abstract: 積層半導体集積回路装置に関し、安価な構成で積層のための3次元スペースを小さくするとともに、十分な電源品質を与える。第1の半導体集積回路装置に第1の半導体基体を厚さ方向に貫通するとともに、第1の電源電位に接続する第1の貫通半導体領域と、第2の電源電位に接続する第2の貫通半導体領域とを設け、第1の貫通半導体領域と第2の貫通半導体領域に夫々接続する第1の電極及び第2の電極を有する第2の半導体集積回路装置を積層する。
Abstract translation: 公开了一种层叠半导体集成电路器件,其中用于层叠的三维空间以低成本构造被降低,并且确保了足够的电源质量。 第一半导体集成电路器件设置有:第一穿透半导体区域,其在厚度方向上穿透第一半导体基体,并且连接到第一电源电位; 以及连接到第二电源电位的第二穿透半导体区域。 第二半导体集成电路器件层压到第一半导体集成电路器件上,所述第二半导体集成电路器件分别具有连接到第一穿透半导体区域和第二穿透半导体区域的第一电极和第二电极。
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公开(公告)号:WO2015079582A1
公开(公告)日:2015-06-04
申请号:PCT/JP2013/082267
申请日:2013-11-29
Applicant: 富士通株式会社
Inventor: 今泉延弘
CPC classification number: H01L24/81 , H01L24/11 , H01L24/13 , H01L24/16 , H01L24/73 , H01L24/83 , H01L24/91 , H01L24/97 , H01L25/50 , H01L2224/05568 , H01L2224/05573 , H01L2224/05624 , H01L2224/05647 , H01L2224/11332 , H01L2224/1182 , H01L2224/13019 , H01L2224/13082 , H01L2224/13147 , H01L2224/13564 , H01L2224/1357 , H01L2224/13847 , H01L2224/13864 , H01L2224/1389 , H01L2224/13911 , H01L2224/13955 , H01L2224/13999 , H01L2224/1601 , H01L2224/16145 , H01L2224/16225 , H01L2224/16238 , H01L2224/16507 , H01L2224/2919 , H01L2224/73104 , H01L2224/73204 , H01L2224/81193 , H01L2224/81815 , H01L2224/8192 , H01L2224/81986 , H01L2224/83193 , H01L2224/83862 , H01L2224/9211 , H01L2224/97 , H01L2225/06513 , H01L2924/00014 , H01L2224/81 , H01L2224/83
Abstract: 複数の基体10、20上にそれぞれ形成された金属層12、22同士を第1金属35を含む多孔質体32を介して対向させる工程と、前記多孔質体の表面の前記第1金属を第2金属36に置換する工程と、前記第2金属を加熱することにより、前記金属層同士を接合する工程と、を含む基体の接合方法。
Abstract translation: 提供了一种基板接合方法,其包括以下步骤:使多个基板(10,20)分别在多孔体(32)上彼此面对的金属层(12,22) 包括插入其间的第一金属(35) 用第二金属(36)代替多孔体表面上的第一金属的步骤; 以及通过加热第二金属来接合金属层的步骤。
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公开(公告)号:WO2015045877A1
公开(公告)日:2015-04-02
申请号:PCT/JP2014/073965
申请日:2014-09-10
Applicant: デクセリアルズ株式会社
Inventor: 森山 浩伸
CPC classification number: H01L23/293 , C08G59/18 , C08G59/24 , C08G59/4207 , C08G59/686 , C08K5/14 , C08L33/10 , C08L63/00 , H01L21/563 , H01L21/6836 , H01L24/13 , H01L24/16 , H01L24/27 , H01L24/29 , H01L24/32 , H01L24/73 , H01L24/75 , H01L24/81 , H01L24/83 , H01L24/92 , H01L24/94 , H01L25/0657 , H01L25/50 , H01L2221/68327 , H01L2221/6834 , H01L2221/68377 , H01L2224/13023 , H01L2224/13111 , H01L2224/13147 , H01L2224/16145 , H01L2224/16225 , H01L2224/16227 , H01L2224/16238 , H01L2224/27003 , H01L2224/271 , H01L2224/2919 , H01L2224/2929 , H01L2224/29387 , H01L2224/2939 , H01L2224/32145 , H01L2224/32225 , H01L2224/73104 , H01L2224/73204 , H01L2224/75301 , H01L2224/75702 , H01L2224/81011 , H01L2224/81191 , H01L2224/81193 , H01L2224/81203 , H01L2224/81204 , H01L2224/81815 , H01L2224/81907 , H01L2224/83191 , H01L2224/83204 , H01L2224/83862 , H01L2224/83907 , H01L2224/92 , H01L2224/9205 , H01L2224/921 , H01L2224/9211 , H01L2224/94 , H01L2225/06513 , H01L2225/06541 , H01L2924/06 , H01L2924/0635 , H01L2924/0665 , H01L2924/186 , H01L2924/20102 , H01L2924/20103 , H01L2924/20104 , H01L2924/00014 , H01L2924/01082 , H01L2924/01083 , H01L2924/01047 , H01L2924/01029 , H01L2924/01051 , H01L2924/05442 , H01L2924/0549 , H01L2924/0532 , H01L2924/01012 , H01L2924/05341 , H01L2924/0102 , H01L2924/0544 , H01L2924/01006 , H01L2224/27 , H01L2924/00012 , H01L2224/81 , H01L2224/83 , H01L21/78 , H01L2924/00
Abstract: ボイドレス実装及び良好なハンダ接合性を実現するアンダーフィル材、及びこれを用いた半導体装置の製造方法を提供する。エポキシ樹脂と、硬化剤とを含有し、示差走査熱量計を用いた小沢法により算出された240℃での反応率の20%に到達する時間が、2.0sec以下であり、該反応率の60%に到達する時間が、3.0sec以上であるアンダーフィル材を用いる。これにより、ボイドレス実装及び良好なハンダ接合性を実現することができる。
Abstract translation: 本发明提供:底部填充材料,其允许无空间安装和良好的焊接性能; 以及使用所述底部填充材料制造半导体器件的方法。 所述底部填充材料含有环氧树脂和硬化剂。 通过使用差示扫描量热计的Ozawa方法在240℃下所述底部填充材料的反应速率最多为2.0s,达到20%和至少3.0s,达到60%。 使用所述底部填充材料允许无空隙安装和良好的焊接性能。
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公开(公告)号:WO2015031280A1
公开(公告)日:2015-03-05
申请号:PCT/US2014/052568
申请日:2014-08-25
Applicant: QUALCOMM INCORPORATED
Inventor: KIM, Chin-Kwan , KUMAR, Rajneesh , BCHIR, Omar James
IPC: H01L23/498
CPC classification number: H01L23/528 , H01L21/768 , H01L23/498 , H01L23/49827 , H01L24/06 , H01L24/16 , H01L24/17 , H01L24/81 , H01L2224/131 , H01L2224/14133 , H01L2224/16237 , H01L2224/16238 , H01L2224/17051 , H01L2224/81191 , H01L2224/81385 , H01L2224/81801 , H01L2924/3841 , H05K1/0296 , H05K1/111 , H05K3/4682 , H05K2201/0376 , H05K2201/094 , Y02P70/611 , H01L2924/00014 , H01L2924/014
Abstract: Some novel features pertain to a substrate that includes a first dielectric layer, a first interconnect, a first cavity, and a second interconnect. The first dielectric layer includes first and second surfaces. The first interconnect is embedded in the first dielectric layer. The first interconnect includes a first side and a second side. The first side is surrounded by the first dielectric layer, where at least a part of the second side is free of contact with the first dielectric layer. The first cavity traverses the first surface of the first dielectric layer to the second side of the first interconnect, where the first cavity overlaps the first interconnect. The second interconnect includes a third side and a fourth side, where the third side is coupled to the first surface of the first dielectric layer.
Abstract translation: 一些新颖的特征涉及包括第一介电层,第一互连,第一腔和第二互连的衬底。 第一介电层包括第一和第二表面。 第一互连嵌入在第一电介质层中。 第一互连包括第一侧和第二侧。 第一侧被第一介电层包围,其中第二侧的至少一部分与第一介电层不接触。 第一空腔穿过第一介电层的第一表面到第一互连的第二侧,其中第一腔与第一互连重叠。 第二互连包括第三侧和第四侧,其中第三侧耦合到第一介电层的第一表面。
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10.MULTILAYER STRUCTURE FOR A SEMICONDUCTOR DEVICE AND A METHOD OF FORMING A MULTILAYER STRUCTURE FOR A SEMICONDUCTOR DEVICE 审中-公开
Title translation: 用于半导体器件的多层结构和形成用于半导体器件的多层结构的方法公开(公告)号:WO2015030670A1
公开(公告)日:2015-03-05
申请号:PCT/SG2013/000374
申请日:2013-08-28
Applicant: INSTITUTE OF TECHNICAL EDUCATION
Inventor: LEE, Teck Kheng , SER, Bok Leng
IPC: H01L21/44 , H01L21/28 , H01L23/522 , H01L29/41 , H01L23/488
CPC classification number: H01L23/49838 , H01L21/4853 , H01L21/4857 , H01L23/3192 , H01L23/49811 , H01L23/49822 , H01L23/525 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/13 , H01L24/14 , H01L2224/02333 , H01L2224/03462 , H01L2224/0401 , H01L2224/05008 , H01L2224/05009 , H01L2224/05022 , H01L2224/05124 , H01L2224/05139 , H01L2224/05144 , H01L2224/05147 , H01L2224/05164 , H01L2224/05166 , H01L2224/05548 , H01L2224/05567 , H01L2224/05569 , H01L2224/05572 , H01L2224/05624 , H01L2224/05639 , H01L2224/05644 , H01L2224/05647 , H01L2224/05664 , H01L2224/05666 , H01L2224/1134 , H01L2224/11462 , H01L2224/11472 , H01L2224/11849 , H01L2224/13022 , H01L2224/13024 , H01L2224/13082 , H01L2224/13111 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13193 , H01L2224/1403 , H01L2224/14051 , H01L2224/16238 , H01L2924/00014 , H01L2924/01028 , H01L2924/01082 , H01L2924/014 , H01L2924/01029
Abstract: A multilayer structure for a semiconductor device and a method of forming a multilayer structure for a semiconductor device. The multilayer structure comprises: a substrate having an electrically conductive portion thereon; a dielectric layer formed over the substrate; the dielectric layer comprising an opening over at least part of the electrically conductive portion; and a conductive pillar formed on the at least part of the electrically conductive portion; wherein the conductive pillar comprises walls defined by at least the opening of the dielectric layer and an opening of a patterned layer.
Abstract translation: 一种用于半导体器件的多层结构和形成半导体器件的多层结构的方法。 多层结构包括:其上具有导电部分的基板; 形成在所述基板上的电介质层; 所述电介质层包括在所述导电部分的至少一部分上的开口; 以及形成在所述导电部分的至少一部分上的导电柱; 其中所述导电柱包括至少由所述电介质层的开口和图案化层的开口限定的壁。
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