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公开(公告)号:WO2017011228A1
公开(公告)日:2017-01-19
申请号:PCT/US2016/041000
申请日:2016-07-05
申请人: INVENSAS CORPORATION
发明人: UZOH, Cyprian, Emeka
IPC分类号: H01L23/00 , H01L23/12 , H01L21/324 , H01L23/485
CPC分类号: H01L24/17 , H01L21/4853 , H01L23/49811 , H01L23/49816 , H01L23/49838 , H01L24/11 , H01L24/13 , H01L24/16 , H01L24/81 , H01L24/83 , H01L25/0657 , H01L25/50 , H01L2224/03009 , H01L2224/03912 , H01L2224/0401 , H01L2224/05124 , H01L2224/05144 , H01L2224/05155 , H01L2224/05568 , H01L2224/05647 , H01L2224/11442 , H01L2224/1145 , H01L2224/11452 , H01L2224/1146 , H01L2224/11462 , H01L2224/11464 , H01L2224/1147 , H01L2224/11614 , H01L2224/1162 , H01L2224/1182 , H01L2224/13083 , H01L2224/13109 , H01L2224/13111 , H01L2224/13124 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13155 , H01L2224/13184 , H01L2224/13309 , H01L2224/13311 , H01L2224/13313 , H01L2224/13339 , H01L2224/13344 , H01L2224/13355 , H01L2224/13409 , H01L2224/13561 , H01L2224/1357 , H01L2224/13809 , H01L2224/13811 , H01L2224/13813 , H01L2224/13839 , H01L2224/13844 , H01L2224/13855 , H01L2224/1601 , H01L2224/16058 , H01L2224/16059 , H01L2224/16104 , H01L2224/16113 , H01L2224/16145 , H01L2224/16227 , H01L2224/16238 , H01L2224/16501 , H01L2224/81193 , H01L2224/81204 , H01L2224/81801 , H01L2224/8184 , H01L2224/83815 , H01L2924/01013 , H01L2924/01028 , H01L2924/01029 , H01L2924/01047 , H01L2924/0105 , H01L2924/01079 , H01L2924/014 , H01L2924/2064 , H01L2924/3511 , H01L2924/3841 , H01L2924/013
摘要: A method of making an assembly can include forming a first conductive element at a first surface of a substrate of a first component, forming conductive nanoparticles at a surface of the conductive element by exposure to an electroless plating bath, juxtaposing the surface of the first conductive element with a corresponding surface of a second conductive element at a major surface of a substrate of a second component, and elevating a temperature at least at interfaces of the juxtaposed first and second conductive elements to a joining temperature at which the conductive nanoparticles cause metallurgical joints to form between the juxtaposed first and second conductive elements. The conductive nanoparticles can be disposed between the surfaces of the first and second conductive elements. The conductive nanoparticles can have long dimensions smaller than 100 nanometers.
摘要翻译: 制造组件的方法可以包括在第一部件的基板的第一表面处形成第一导电元件,通过暴露于化学镀浴,在导电元件的表面上形成导电纳米颗粒,并置第一导电的表面 元件,其具有在第二部件的基板的主表面处的第二导电元件的对应表面,并且至少在并置的第一和第二导电元件的界面处将温度升高到导电纳米颗粒引起冶金接头的接合温度 在并置的第一和第二导电元件之间形成。 导电纳米颗粒可以设置在第一和第二导电元件的表面之间。 导电纳米颗粒可以具有小于100纳米的长尺寸。
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公开(公告)号:WO2016176576A1
公开(公告)日:2016-11-03
申请号:PCT/US2016/030117
申请日:2016-04-29
IPC分类号: H01L27/00
CPC分类号: H01L21/78 , H01L21/52 , H01L21/561 , H01L21/565 , H01L21/568 , H01L23/295 , H01L23/3135 , H01L23/49816 , H01L23/49822 , H01L23/49827 , H01L23/5389 , H01L24/11 , H01L24/13 , H01L24/16 , H01L24/19 , H01L24/20 , H01L24/27 , H01L24/29 , H01L24/32 , H01L24/83 , H01L24/92 , H01L24/96 , H01L24/97 , H01L25/16 , H01L2224/04105 , H01L2224/11334 , H01L2224/11849 , H01L2224/11901 , H01L2224/12105 , H01L2224/131 , H01L2224/13111 , H01L2224/13113 , H01L2224/13116 , H01L2224/13124 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13155 , H01L2224/16227 , H01L2224/2732 , H01L2224/27334 , H01L2224/2745 , H01L2224/27462 , H01L2224/27464 , H01L2224/29111 , H01L2224/29113 , H01L2224/29116 , H01L2224/29124 , H01L2224/29139 , H01L2224/29144 , H01L2224/29147 , H01L2224/29155 , H01L2224/29294 , H01L2224/293 , H01L2224/32227 , H01L2224/73267 , H01L2224/83192 , H01L2224/83815 , H01L2224/83911 , H01L2224/83913 , H01L2224/83986 , H01L2224/92 , H01L2224/97 , H01L2924/15313 , H01L2924/19041 , H01L2924/19043 , H01L2924/19105 , H01L2224/81 , H01L2924/01082 , H01L2924/0105 , H01L2924/014 , H01L2924/00014 , H01L2224/81815 , H01L2224/8191 , H01L22/00 , H01L21/56 , H01L2224/8391
摘要: A method of making a semiconductor component package can include providing a substrate comprising conductive traces, soldering a surface mount device (SMD) to the substrate with solder, encapsulating the SMD on the substrate with a first mold compound over and around the SMD to form a component assembly, and mounting the component assembly to a temporary carrier with a first side of the component assembly oriented towards the temporary carrier. The method can further include mounting a semiconductor die comprising a conductive interconnect to the temporary carrier adjacent the component assembly, encapsulating the component assembly and the semiconductor die with a second mold compound to form a reconstituted panel, and exposing the conductive interconnect and the conductive traces at the first side and the second side of the component assembly with respect to the second mold compound.
摘要翻译: 制造半导体部件封装的方法可以包括提供包括导电迹线的衬底,用焊料将表面贴装器件(SMD)焊接到衬底,将SMD封装在衬底上,并在SMD周围和周围形成第一模具化合物,以形成 部件组件,以及将部件组件安装到临时载体上,其中部件组件的第一侧朝向临时载体。 该方法还可以包括将包括导电互连的半导体管芯安装到邻近部件组件的临时载体上,用第二模具化合物封装组件组件和半导体管芯以形成重构的面板,以及使导电互连和导电迹线 在组件组件的第一侧和第二侧相对于第二模具化合物。
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3.SEMICONDUCTOR PACKAGES WITH AN INTERMETALLIC LAYER HAVING A MELTING TEMPERATURE ABOVE 260°C, COMPRISING AN INTERMETALLIC CONSISTING OF SILVER AND TIN OR AN INTERMETALLIC CONSISTING OF COPPER AND TIN, AND CORRESPONDING MANUFACTURING METHODS 审中-公开
标题翻译: 具有熔融温度高于260°C的金属间隔层的半导体封装,包含银和锡的金属间化合物或铜和锡的电介质和相应的制造方法公开(公告)号:WO2016122776A1
公开(公告)日:2016-08-04
申请号:PCT/US2015/064521
申请日:2015-12-08
IPC分类号: H01L21/60 , H01L23/482 , H01L23/485 , H01L21/78 , H01L21/683
CPC分类号: H01L24/32 , H01L21/4825 , H01L21/6836 , H01L21/78 , H01L23/482 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/13 , H01L24/16 , H01L24/17 , H01L24/27 , H01L24/28 , H01L24/29 , H01L24/30 , H01L24/31 , H01L24/33 , H01L24/81 , H01L24/83 , H01L24/94 , H01L2221/68327 , H01L2221/68381 , H01L2224/03416 , H01L2224/03418 , H01L2224/03444 , H01L2224/0345 , H01L2224/03452 , H01L2224/03462 , H01L2224/03464 , H01L2224/0347 , H01L2224/0348 , H01L2224/0401 , H01L2224/04026 , H01L2224/05075 , H01L2224/05082 , H01L2224/05083 , H01L2224/05147 , H01L2224/05155 , H01L2224/05166 , H01L2224/05171 , H01L2224/05639 , H01L2224/05647 , H01L2224/11462 , H01L2224/11464 , H01L2224/11849 , H01L2224/1308 , H01L2224/13111 , H01L2224/13139 , H01L2224/13147 , H01L2224/13155 , H01L2224/13166 , H01L2224/13171 , H01L2224/16227 , H01L2224/16503 , H01L2224/16507 , H01L2224/17106 , H01L2224/2908 , H01L2224/29082 , H01L2224/29083 , H01L2224/29111 , H01L2224/29139 , H01L2224/29147 , H01L2224/29155 , H01L2224/29166 , H01L2224/29171 , H01L2224/29565 , H01L2224/29582 , H01L2224/29655 , H01L2224/29666 , H01L2224/3003 , H01L2224/30505 , H01L2224/32225 , H01L2224/32245 , H01L2224/32503 , H01L2224/81439 , H01L2224/8181 , H01L2224/81815 , H01L2224/81825 , H01L2224/83439 , H01L2224/8381 , H01L2224/83815 , H01L2224/83825 , H01L2224/8481 , H01L2224/8581 , H01L2224/8681 , H01L2224/94 , H01L2924/00015 , H01L2924/01327 , H01L2924/10162 , H01L2924/12041 , H01L2224/03 , H01L2224/27 , H01L2924/00014 , H01L2924/00012 , H01L2924/01074 , H01L2924/01024 , H01L2924/20642 , H01L2224/48
摘要: Methods of forming a semiconductor package (2, 12) are provided. Implementations include forming on a die backside (16) an intermediate metal layer (26) having multiple sublayers (40-46), each including a metal selected from the group consisting of titanium, nickel, copper, silver, and combinations thereof. A tin layer (48) is deposited onto the intermediate metal layer (26) and is then reflowed with a silver layer (52) of a substrate (50) to form an intermetallic layer (56) having a melting temperature above 260 degrees Celsius and including an intermetallic consisting of silver and tin and/or an intermetallic consisting of copper and tin. Another method of forming a semiconductor package includes forming a bump (22) on each of a plurality of exposed pads (20) of a top side (18) of a die (14), each exposed pad (20) surrounded by a passivation layer (24), each bump (22) including an intermediate metal layer (36) as described above and a tin layer (48) coupled to the intermediate metal layer (36), the tin layer (48) being then reflowed with a silver layer (52) of a substrate (50) to form an intermetallic layer (64), as described above.
摘要翻译: 提供形成半导体封装(2,12)的方法。 实施方案包括在模具背面(16)上形成具有多个子层(40-46)的中间金属层(26),每个子层包括选自钛,镍,铜,银及其组合的金属。 将锡层(48)沉积在中间金属层(26)上,然后用衬底(50)的银层(52)回流以形成熔点高于260摄氏度的金属间层(56),并且 包括由银和锡组成的金属间化合物和/或由铜和锡组成的金属间化合物。 形成半导体封装的另一种方法包括在裸片(14)的顶侧(18)的多个裸露焊盘(20)的每一个上形成凸块(22),每个裸露焊盘(20)被钝化层包围 (24)中,每个凸起(22)包括如上所述的中间金属层(36)和耦合到中间金属层(36)的锡层(48),然后锡层(48)用银层 (52),以形成金属间层(64),如上所述。
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公开(公告)号:WO2016015584A1
公开(公告)日:2016-02-04
申请号:PCT/CN2015/084799
申请日:2015-07-22
申请人: 华为技术有限公司
CPC分类号: H01L25/16 , H01G2/065 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/13 , H01L24/16 , H01L24/81 , H01L2224/0345 , H01L2224/03452 , H01L2224/0401 , H01L2224/04042 , H01L2224/05557 , H01L2224/05571 , H01L2224/05624 , H01L2224/05647 , H01L2224/11 , H01L2224/1134 , H01L2224/13023 , H01L2224/13124 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13155 , H01L2224/13166 , H01L2224/13611 , H01L2224/13644 , H01L2224/13647 , H01L2224/13655 , H01L2224/13664 , H01L2224/16268 , H01L2224/48091 , H01L2224/48227 , H01L2224/73204 , H01L2224/73207 , H01L2224/75744 , H01L2224/75745 , H01L2224/81191 , H01L2224/81193 , H01L2224/81203 , H01L2224/81205 , H01L2224/81801 , H01L2224/92125 , H01L2924/181 , H01L2924/19041 , H01L2924/19042 , H01L2924/19043 , H01L2924/19104 , H01L2924/00014 , H01L2924/00012
摘要: 一种芯片集成模块(10),包括管芯(11)、无源器件(13)及连接件(15),所述管芯(11)设有管芯结合部(110),所述无源器件(13)设有无源器件结合部(130),所述管芯(11)的管芯结合部(110)及无源器件(13)的无源器件结合部(130)相对设置,所述连接件(15)设置于所述管芯结合部(110)与所述无源器件结合部(130)之间并连接于所述管芯结合部(110)与所述无源器件结合部(130)。该芯片集成模块(10)易于集成且成本较低;且由于管芯(11)与无源器件(13)互连路径更短,可提升无源器件性能。还公开一种芯片封装结构及一种芯片集成方法。
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公开(公告)号:WO2015198839A1
公开(公告)日:2015-12-30
申请号:PCT/JP2015/066351
申请日:2015-06-05
申请人: ソニー株式会社
CPC分类号: H01L24/16 , H01L21/563 , H01L21/6836 , H01L23/12 , H01L23/3121 , H01L23/3142 , H01L23/49838 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/13 , H01L24/14 , H01L24/29 , H01L24/32 , H01L24/48 , H01L24/73 , H01L24/81 , H01L24/83 , H01L24/92 , H01L25/03 , H01L25/0655 , H01L25/0657 , H01L25/105 , H01L2221/68327 , H01L2221/6834 , H01L2224/0345 , H01L2224/03614 , H01L2224/0381 , H01L2224/03912 , H01L2224/05166 , H01L2224/05173 , H01L2224/05647 , H01L2224/10175 , H01L2224/1146 , H01L2224/11462 , H01L2224/1147 , H01L2224/1181 , H01L2224/11849 , H01L2224/119 , H01L2224/13014 , H01L2224/13082 , H01L2224/13083 , H01L2224/131 , H01L2224/13109 , H01L2224/13111 , H01L2224/13139 , H01L2224/13147 , H01L2224/13155 , H01L2224/14131 , H01L2224/14133 , H01L2224/14136 , H01L2224/16013 , H01L2224/16055 , H01L2224/16057 , H01L2224/16058 , H01L2224/16227 , H01L2224/16237 , H01L2224/16503 , H01L2224/2919 , H01L2224/2929 , H01L2224/29387 , H01L2224/32225 , H01L2224/48091 , H01L2224/48106 , H01L2224/48227 , H01L2224/73204 , H01L2224/81011 , H01L2224/81012 , H01L2224/81065 , H01L2224/81075 , H01L2224/8112 , H01L2224/81121 , H01L2224/81143 , H01L2224/81191 , H01L2224/81201 , H01L2224/81203 , H01L2224/81204 , H01L2224/8121 , H01L2224/81385 , H01L2224/81444 , H01L2224/81815 , H01L2224/81893 , H01L2224/81906 , H01L2224/81907 , H01L2224/8191 , H01L2224/81935 , H01L2224/81986 , H01L2224/831 , H01L2224/83104 , H01L2224/83192 , H01L2224/83204 , H01L2224/83862 , H01L2224/83907 , H01L2224/92 , H01L2224/9211 , H01L2224/92125 , H01L2225/0651 , H01L2225/06517 , H01L2225/0652 , H01L2225/06562 , H01L2225/06572 , H01L2225/06586 , H01L2924/00014 , H01L2924/00015 , H01L2924/01028 , H01L2924/01046 , H01L2924/01079 , H01L2924/014 , H01L2924/15151 , H01L2924/15311 , H01L2924/15747 , H01L2924/181 , H01L2924/351 , H01L2924/381 , H01L2924/3841 , H05K1/111 , H05K3/3436 , H05K3/3452 , H05K2201/09227 , H05K2201/09663 , H05K2201/0979 , H05K2201/0989 , H05K2201/10674 , Y02P70/611 , Y02P70/613 , H01L2924/00012 , H01L2224/16225 , H01L2924/00 , H01L2224/81 , H01L2224/83 , H01L2924/05442 , H01L2924/01047 , H01L2924/01074 , H01L2224/814 , H01L2224/45099 , H01L2221/68304 , H01L21/304 , H01L2221/68381 , H01L21/78 , H01L2224/03 , H01L2224/11
摘要: 半導体チップは、チップ本体と、チップ本体の素子形成面に設けられたはんだを含む複数の電極とを有する。パッケージ基板は、基板本体と、基板本体の表面に設けられた複数の配線およびソルダレジスト層とを有する。はんだを含む複数の電極は、第1の電位を供給する複数の第1電極と、第1の電位とは異なる第2の電位を供給する複数の第2電極とを含む。複数の第1電極および複数の第2電極は、チップ本体の中央部に、行方向および列方向の両方に交互に配置されている。複数の配線は、複数の第1電極を相互に接続する複数の第1配線と、複数の第2電極を相互に接続する複数の第2配線とを含む。
摘要翻译: 本发明的半导体芯片包括主芯片体和设置在所述主芯片体的元件形成表面上的多个焊料包含电极。 封装基板包括:主基板主体; 以及设置在所述主基板主体的表面上的多根导线和阻焊层。 多个含焊料的电极包括提供第一电位的多个第一电极和提供不同于第一电位的第二电位的多个第二电极。 多个第一电极和多个第二电极在主芯片体的中间沿行方向和列方向交替布置。 上述多根线包括将多个第一电极彼此连接的多条第一线和将多个第二电极彼此连接的多条第二线。
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公开(公告)号:WO2015123952A1
公开(公告)日:2015-08-27
申请号:PCT/CN2014/080839
申请日:2014-06-26
申请人: 南通富士通微电子股份有限公司
IPC分类号: H01L23/488
CPC分类号: H01L23/49537 , H01L21/4828 , H01L21/56 , H01L23/293 , H01L23/3107 , H01L23/3135 , H01L23/3171 , H01L23/49548 , H01L23/49572 , H01L23/49582 , H01L24/03 , H01L24/05 , H01L24/06 , H01L24/11 , H01L24/13 , H01L24/16 , H01L24/17 , H01L24/81 , H01L2224/0345 , H01L2224/0401 , H01L2224/05124 , H01L2224/05147 , H01L2224/05155 , H01L2224/1145 , H01L2224/11462 , H01L2224/1147 , H01L2224/1181 , H01L2224/11849 , H01L2224/119 , H01L2224/13007 , H01L2224/13021 , H01L2224/13083 , H01L2224/13111 , H01L2224/13147 , H01L2224/13155 , H01L2224/16245 , H01L2224/48091 , H01L2224/48247 , H01L2224/81191 , H01L2224/81801 , H01L2224/81815 , H01L2924/01013 , H01L2924/01022 , H01L2924/01024 , H01L2924/01028 , H01L2924/01029 , H01L2924/0105 , H01L2924/01073 , H01L2924/2064 , H01L2924/00014 , H01L2924/01047 , H01L2924/014
摘要: 一种半导体封装结构,包括:芯片,所述芯片的表面设有焊盘和钝化层,所述钝化层设有裸露所述焊盘的第一开口,所述焊盘上设有种子层和柱状凸点,所述种子层与焊盘相连,所述柱状凸点堆叠于所述种子层上;引线框架,所述引线框架设有若干分立的引脚,内引脚和外引脚设于引脚的相对两面;所述芯片倒装于引线框架上,所述柱状凸点与所述内引脚相连;塑封层,所述塑封层密封所述芯片、柱状凸点和引线框架,并裸露出所述外引脚。所述封装结构占据的横向的面积减小,整个封装结构的体积相应减小,提高了封装结构的集成度。还提供一种半导体封装结构的形成方法。
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公开(公告)号:WO2015104967A1
公开(公告)日:2015-07-16
申请号:PCT/JP2014/083354
申请日:2014-12-17
申请人: 株式会社村田製作所
IPC分类号: H01L21/331 , H01L21/3205 , H01L21/60 , H01L21/768 , H01L23/522 , H01L29/737
CPC分类号: H01L24/13 , H01L24/02 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/16 , H01L29/0692 , H01L29/0817 , H01L29/20 , H01L29/205 , H01L29/41708 , H01L29/66234 , H01L29/66242 , H01L29/66272 , H01L29/6631 , H01L29/66318 , H01L29/732 , H01L29/737 , H01L29/7371 , H01L29/7375 , H01L29/7378 , H01L2224/02331 , H01L2224/0235 , H01L2224/02372 , H01L2224/02373 , H01L2224/0239 , H01L2224/024 , H01L2224/03912 , H01L2224/0401 , H01L2224/05022 , H01L2224/05024 , H01L2224/05147 , H01L2224/05166 , H01L2224/05558 , H01L2224/05559 , H01L2224/05569 , H01L2224/05572 , H01L2224/05666 , H01L2224/1134 , H01L2224/13013 , H01L2224/13022 , H01L2224/13024 , H01L2224/13026 , H01L2224/13083 , H01L2224/131 , H01L2224/13111 , H01L2224/13147 , H01L2224/13155 , H01L2224/13563 , H01L2224/13611 , H01L2224/16225 , H01L2224/16227 , H01L2224/16235 , H01L2924/01029 , H01L2924/07025 , H01L2924/10329 , H01L2924/10337 , H01L2924/10338 , H01L2924/13051 , H01L2924/13055 , H01L2924/1423 , H01L2924/351 , H01L2924/01079 , H01L2924/00012 , H01L2924/00014 , H01L2924/014
摘要: バイポーラトランジスタBTを備えた半導体装置では、ピラーバン(20)と、エミッタ層(5)に電気的に接続された第2配線(14)とが接触する第3開口(16)が、エミッタ層(5)の直上に対応する位置からエミッタ層(5)の長手方向にずらされて、第3開口(16)が、エミッタ層(5)に対して、エミッタ層(5)の長手方向の端部と第3開口(16)の開口端とがほぼ一致するように配置されている。
摘要翻译: 公开了一种设置有双极晶体管(BT)的半导体器件。 在半导体装置中,与发射极层(5)电连接的柱状凸起(20)和第二配线(14)彼此接触的第三开口(16)通过沿着 发射极层(5)从对应于发射极层(5)正上方的部分的位置开始,所述第三开口(16)相对于发射极层(5)设置,使得发射极层(5)中的发射极层 纵向方向和第三开口(16)的开口端基本相匹配。
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8.METHOD OF FORMING A MICROELECTRONIC ASSEMBLY BY PLATING METAL CONNECTORS AFTER ASSEMBLYING FIRST AND SECOND COMPONENTS AND CORRESPONDING DEVICE 审中-公开
标题翻译: 在组装第一和第二组件和相应设备之后通过金属连接器的形成形成微电子组件的方法公开(公告)号:WO2014204771A1
公开(公告)日:2014-12-24
申请号:PCT/US2014/042064
申请日:2014-06-12
申请人: INVENSAS CORPORATION
发明人: HABA, Belgacem , WOYCHIK, Charles, G. , UZOH, Cyprian, Emeka , NEWMAN, Michael , CASKEY, Terrence
IPC分类号: H01L21/60 , H01L23/485 , H01L21/98 , H01L25/065
CPC分类号: H01L24/13 , H01L21/563 , H01L23/564 , H01L24/02 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/14 , H01L24/16 , H01L24/17 , H01L24/32 , H01L24/81 , H01L24/83 , H01L24/92 , H01L25/0652 , H01L25/0655 , H01L25/0657 , H01L25/50 , H01L2224/02372 , H01L2224/0345 , H01L2224/03462 , H01L2224/03464 , H01L2224/0347 , H01L2224/03912 , H01L2224/03914 , H01L2224/0401 , H01L2224/05147 , H01L2224/05155 , H01L2224/05557 , H01L2224/05568 , H01L2224/05571 , H01L2224/05609 , H01L2224/05611 , H01L2224/05639 , H01L2224/05644 , H01L2224/05647 , H01L2224/05655 , H01L2224/05657 , H01L2224/05664 , H01L2224/10145 , H01L2224/1146 , H01L2224/11462 , H01L2224/11464 , H01L2224/1147 , H01L2224/11903 , H01L2224/13024 , H01L2224/13025 , H01L2224/13109 , H01L2224/13111 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13155 , H01L2224/13157 , H01L2224/13164 , H01L2224/1319 , H01L2224/14517 , H01L2224/1601 , H01L2224/16057 , H01L2224/16058 , H01L2224/16104 , H01L2224/16105 , H01L2224/16145 , H01L2224/16146 , H01L2224/16225 , H01L2224/16227 , H01L2224/16503 , H01L2224/17505 , H01L2224/17517 , H01L2224/32145 , H01L2224/32225 , H01L2224/73204 , H01L2224/81001 , H01L2224/81007 , H01L2224/811 , H01L2224/81139 , H01L2224/8192 , H01L2224/83104 , H01L2224/9201 , H01L2224/9212 , H01L2225/06513 , H01L2225/06524 , H01L2225/06541 , H01L2924/00014 , H05K1/181 , H05K3/30 , Y10T29/4913 , H01L2924/00012 , H01L2924/01015 , H01L2924/01074 , H01L2224/05552
摘要: Microelectronic assemblies and methods for making the same are disclosed herein. In one embodiment, a method of forming a microelectronic assembly comprises: assembling first and second components (102, 128) to have first major surfaces (104, 130) of the first and second components (102, 128) facing one another and spaced apart from one another by a predetermined spacing, the first component (102) having first and second oppositely-facing major surfaces (104, 106), a first thickness extending in a first direction between the first and second major surfaces (104, 106), and a plurality of first metal connection elements (112) at the first major surface (104), the second component (128) having a plurality of second metal connection elements (132) at the first major surface (130) of the second component (128); and then plating (electroplating or electroless plating) a plurality of metal connector regions (146) each connecting and extending continuously between a respective first connection element (112) and a corresponding second connection element (132) opposite the respective first connection element (112) in the first direction. The first and second metal connection elements (112, 132) may comprise metal vias (116, 134) in the components (102, 128) or metal pads (118) at the surface of the components (102, 128), the metal vias (116, 134) or the metal pads (118) being covered by plated metal regions (114). A first seed layer (126) may be formed overlying the major surface of the first component (102) before the plating process, wherein uncovered portions of the first seed layer (126) are removed after plating the metal connector regions (146). Similarly, a second seed layer (144) may be formed overlying the major surface of the second component (128). A plurality of barrier regions (152) may overlie the sidewalls of at least one of the metal connector regions (146), the first plated metal regions (114) or the second plated metal regions. At least some corresponding first and second metal connection elements (112, 132) may optionally not share a common axis. At least some first and second surfaces (113, 131) of the first metal connection elements (112) and the respective second metal connection elements (132) connected thereto may optionally not be parallel to a common plane.
摘要翻译: 本文公开了微电子组件及其制造方法。 在一个实施例中,形成微电子组件的方法包括:组装第一和第二部件(102,128)以使第一和第二部件(102,128)彼此面对并间隔开的第一主表面(104,130) 第一部件(102)具有第一和第二相对的主表面(104,106),在第一和第二主表面(104,106)之间沿第一方向延伸的第一厚度, 以及在所述第一主表面(104)处的多个第一金属连接元件(112),所述第二部件(128)在所述第二部件的所述第一主表面(130)处具有多个第二金属连接元件(132) 128); 然后电镀(电镀或化学镀)多个金属连接器区域(146),每个金属连接器区域在相应的第一连接元件(112)和与相应的第一连接元件(112)相对的对应的第二连接元件(132)之间连续延伸并延伸, 在第一个方向。 第一和第二金属连接元件(112,132)可以包括组件(102,128)中的金属通孔(116,134)或元件(102,128)的表面处的金属焊盘(118),金属通孔 (116,134)或金属焊盘(118)被电镀金属区域(114)覆盖。 可以在电镀工艺之前,在第一部件(102)的主表面上形成第一种子层(126),其中在镀覆金属连接器区域(146)之后,去除第一籽晶层(126)的未覆盖部分。 类似地,可以形成第二种子层(144),覆盖第二部件(128)的主表面。 多个阻挡区域(152)可以覆盖金属连接器区域(146),第一电镀金属区域(114)或第二电镀金属区域中的至少一个的侧壁。 至少一些对应的第一和第二金属连接元件(112,132)可以可选地不共享公共轴线。 第一金属连接元件(112)和连接到其上的相应的第二金属连接元件(132)的至少一些第一和第二表面(113,131)可以可选地不平行于公共平面。
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公开(公告)号:WO2014033977A1
公开(公告)日:2014-03-06
申请号:PCT/JP2013/001915
申请日:2013-03-21
申请人: パナソニック株式会社
发明人: 樋口 裕一
IPC分类号: H01L21/60 , H01L25/065 , H01L25/07 , H01L25/18
CPC分类号: H01L25/0657 , H01L21/563 , H01L23/481 , H01L24/02 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/13 , H01L24/16 , H01L24/17 , H01L24/32 , H01L24/81 , H01L24/83 , H01L2224/02372 , H01L2224/0239 , H01L2224/0345 , H01L2224/03462 , H01L2224/03614 , H01L2224/03912 , H01L2224/03914 , H01L2224/0401 , H01L2224/05011 , H01L2224/05012 , H01L2224/05015 , H01L2224/05073 , H01L2224/05082 , H01L2224/05124 , H01L2224/05166 , H01L2224/05187 , H01L2224/05551 , H01L2224/05552 , H01L2224/05555 , H01L2224/05557 , H01L2224/05558 , H01L2224/05559 , H01L2224/05573 , H01L2224/05582 , H01L2224/05609 , H01L2224/05611 , H01L2224/05613 , H01L2224/05617 , H01L2224/05618 , H01L2224/05624 , H01L2224/05639 , H01L2224/05644 , H01L2224/05647 , H01L2224/05655 , H01L2224/05657 , H01L2224/05666 , H01L2224/05684 , H01L2224/1145 , H01L2224/11462 , H01L2224/13014 , H01L2224/13017 , H01L2224/13019 , H01L2224/13024 , H01L2224/13025 , H01L2224/1308 , H01L2224/13082 , H01L2224/13083 , H01L2224/131 , H01L2224/13109 , H01L2224/13111 , H01L2224/13113 , H01L2224/13117 , H01L2224/13118 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13155 , H01L2224/13157 , H01L2224/13166 , H01L2224/13184 , H01L2224/16014 , H01L2224/16058 , H01L2224/16148 , H01L2224/16237 , H01L2224/32145 , H01L2224/73104 , H01L2224/73204 , H01L2224/8112 , H01L2224/81121 , H01L2224/8114 , H01L2224/81141 , H01L2224/81143 , H01L2224/81193 , H01L2224/81201 , H01L2224/83862 , H01L2224/92125 , H01L2225/06513 , H01L2225/06541 , H01L2225/06548 , H01L2225/06593 , H01L2924/01032 , H01L2924/207 , H01L2924/2075 , H01L2924/20751 , H01L2924/20752 , H01L2924/20753 , H01L2924/20754 , H01L2924/20755 , H01L2924/381 , H01L2924/384 , H01L2224/16225 , H01L2224/32225 , H01L2924/00012 , H01L2924/00014 , H01L2924/04953 , H01L2924/014 , H01L2924/01022 , H01L2924/01029
摘要: 第1の半導体チップ(100)と第2の半導体チップ(200)とが接合された積層チップを有する半導体装置である。第1の半導体チップの主面上には、第1の電極パッド(110)と、第1の電極パッドの上に形成された第1のバンプ(120)とが形成されている。第2の半導体チップ(200)の主面上には、第1のバンプと接合するように第2のバンプ(220)が形成されている。第1の電極パッド(110)は、中央に段差状となる開口部を有している。第1のバンプ(120)は、第1の電極パッド(110)における開口部とその周辺部との段差状に跨るように形成された中央が窪んだ凹状を有する。
摘要翻译: 该半导体器件具有通过接合第一半导体芯片(100)和第二半导体芯片(200)而产生的层叠芯片。 在第一半导体芯片的主表面上形成有形成在第一电极焊盘上的第一电极焊盘(110)和第一凸块(120)。 在第二半导体芯片(200)的主表面上形成有用于与第一凸块接合的第二凸块(220)。 第一电极焊盘(110)具有孔,使得中心部分具有阶梯形状。 第一凸块(120)具有中心部分凹陷的凹陷形状,以便跨越第一电极焊盘(110)的孔径和周边部分的阶梯形状。
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10.
公开(公告)号:WO2013089199A1
公开(公告)日:2013-06-20
申请号:PCT/JP2012/082413
申请日:2012-12-13
申请人: 旭化成イーマテリアルズ株式会社
CPC分类号: H01L24/29 , C08K2201/001 , C09J7/10 , C09J9/02 , C09J2201/602 , C09J2205/102 , H01L23/3114 , H01L24/13 , H01L24/16 , H01L24/32 , H01L24/83 , H01L2224/1308 , H01L2224/131 , H01L2224/13124 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13155 , H01L2224/13166 , H01L2224/13184 , H01L2224/27003 , H01L2224/27436 , H01L2224/27442 , H01L2224/27901 , H01L2224/29082 , H01L2224/2919 , H01L2224/2929 , H01L2224/29309 , H01L2224/29311 , H01L2224/29316 , H01L2224/29318 , H01L2224/29324 , H01L2224/29339 , H01L2224/29344 , H01L2224/29347 , H01L2224/29355 , H01L2224/29364 , H01L2224/2939 , H01L2224/294 , H01L2224/29499 , H01L2224/73104 , H01L2224/73204 , H01L2224/81903 , H01L2224/83191 , H01L2224/83851 , H01L2224/9211 , H01L2924/07802 , H01L2924/07811 , H01L2924/15788 , H01L2924/00014 , H01L2924/0665 , H01L2924/00012 , H01L2924/014 , H01L2224/81 , H01L2224/83 , H01L2924/00
摘要: 接続前に接続部の検査が可能であり、接続に寄与する導電性粒子数を予測することが可能であり、かつ、接続時のアライメントマークの認識性に優れる異方導電性フィルム付き半導体チップ又はウェハの提供。 片面に複数の回路電極を有する半導体チップ又はウェハと、該回路電極を覆う異方導電性フィルムとを有する異方導電性フィルム付き半導体チップ又はウェハであって、該異方導電性フィルムは、絶縁性樹脂成分と導電性粒子とを含み、かつ、該異方導電性フィルムに含まれる全導電性粒子数の60%以上が、該回路電極の平均高さよりも該異方導電性フィルムの表面側に存在することを特徴とする、前記異方導電性フィルム付き半導体チップ又はウェハ。
摘要翻译: 提供了具有附着的各向异性导电膜的半导体芯片或晶片,其中可以在连接之前检查连接部分,可以预测有助于连接的导电颗粒的数量,并且可以在连接期间容易地区分对准标记。 具有附着的各向异性导电膜的半导体芯片或晶片,具有在一个表面上具有多个电路电极的半导体芯片或晶片以及覆盖电路电极的各向异性导电膜,其中具有附着的各向异性导电膜的半导体芯片或晶片 其特征在于各向异性导电膜含有绝缘树脂组分和导电颗粒,并且各向异性导电膜中包含的不少于60%的导电颗粒进一步朝向各向异性导电膜的表面比平均高度 电路电极。
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