METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE
    5.
    发明申请
    METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE 审中-公开
    制造半导体器件和半导体器件的方法

    公开(公告)号:WO2002103792A2

    公开(公告)日:2002-12-27

    申请号:PCT/IB2002/002305

    申请日:2002-06-17

    Abstract: The invention relates to a method of manufacturing a semiconductor device (10), wherein a semiconductor element (1) provided with a number of connection regions (2) is fitted between a first, electroconductive plate (3) and a second plate (4), wherein two connection conductors (3A, 3B) are formed, from the first plate (3), for the two connection regions (2A, 2B) of the element (1), wherein a passivating encapsulation (5) is provided between the plates (3, 4) and around the element (1), and wherein the device (10) is formed by applying a mechanical separating technique in two mutually perpendicular directions (L, M). In a method according to the invention, the connection conductors (3A, 3B) are formed by providing a mask (6) on the first conducting plate (3) in such a manner that a part (3C) of the plate (3) situated between the connection regions (2A, 2B) remains exposed, which part is subsequently removed by etching. Such a method enables a very compact discrete or at least semi-discrete semiconductor device (10) to be readily obtained at low cost, while a high yield is achieved. In a preferred embodiment, also further parts (3D) of the conducting plate (3) situated at the location where the device (10) is to be sawn, cut or broken remain uncovered by the mask (6) and are removed during etching.

    Abstract translation: 本发明涉及一种制造半导体器件(10)的方法,其中在第一导电板(3)和第二板(4)之间安装设有多个连接区域(2)的半导体元件(1) ,其中,对于所述元件(1)的两个连接区域(2A,2B),从所述第一板(3)形成两个连接导体(3A,3B),其中在所述板 (3)和所述元件(1)周围,并且其中所述装置(10)通过在两个相互垂直的方向(L,M)上施加机械分离技术而形成。 在根据本发明的方法中,连接导体(3A,3B)通过在第一导电板(3)上设置掩模(6)而形成,使得板(3)的部分(3C)位于 在连接区域(2A,2B)之间保持暴露,随后通过蚀刻去除该部分。 这种方法使得能够以低成本容易地获得非常紧凑的离散或至少半分立半导体器件(10),同时实现高产率。 在优选实施例中,位于设备(10)将被锯,切割或断裂的位置处的导电板(3)的另外的部分(3D)保持未被掩模(6)覆盖,并且在蚀刻期间被移除。

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