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公开(公告)号:WO2014103370A1
公开(公告)日:2014-07-03
申请号:PCT/JP2013/058409
申请日:2013-03-22
申请人: 株式会社東芝
发明人: 青木 慎
CPC分类号: H05K3/3484 , B23K1/0016 , B23K1/008 , B23K1/203 , B23K3/0638 , B23K2201/42 , H01L24/13 , H01L24/16 , H01L24/75 , H01L24/81 , H01L2224/131 , H01L2224/16237 , H01L2224/7501 , H01L2224/75251 , H01L2224/755 , H01L2224/75601 , H01L2224/75611 , H01L2224/7565 , H01L2224/75704 , H01L2224/75705 , H01L2224/75745 , H01L2224/75804 , H01L2224/75824 , H01L2224/759 , H01L2224/75901 , H01L2224/81011 , H01L2224/81191 , H01L2224/814 , H01L2224/81815 , H05K3/3447 , H05K13/0465 , H01L2924/014
摘要: 実施形態にかかる部品接合装置は、一例として、接合剤保持部と、基板保持部と、部品保持部と、第一の移動部と、第二の移動部と、備える。第二の移動部は、基板保持部および部品保持部のうち少なくともいずれか一方を動かして回路基板と部品との相対的な位置を変更可能である。第一の移動部が、第二の面の少なくとも貫通孔が開口された領域に接合剤を接触させる。接合剤が第二の面側に接触された状態で、第二の移動部が、第一の面側からピンを貫通孔に通す。ピンが貫通孔に通された状態で、第一の移動部が、第二の面から接合剤を離間させる。
摘要翻译: 根据本发明的实施例,部件接合装置设置有例如粘合剂保持部,基板保持部,部件保持部,第一移动部和第二移动部。 第二移动部能够通过移动基板保持部和/或部件保持部来改变电路基板和部件的相对位置。 第一移动部分使粘合剂与形成有通孔的至少第二表面区域接触。 在粘合剂与第二表面侧接触的状态下,第二移动部从第一表面侧将销插入贯通孔。 在销插入通孔的状态下,第一移动部分将粘合剂与第二表面分离。
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公开(公告)号:WO2012061199A3
公开(公告)日:2012-06-28
申请号:PCT/US2011058080
申请日:2011-10-27
申请人: TESSERA INC , HABA BELGACEM , MOHAMMED ILYAS , CHAU ELLIS , LEE SANG II , DESAI KISHOR
发明人: HABA BELGACEM , MOHAMMED ILYAS , CHAU ELLIS , LEE SANG II , DESAI KISHOR
IPC分类号: H01L21/56
CPC分类号: H01L23/49811 , H01L21/563 , H01L24/13 , H01L24/16 , H01L24/29 , H01L24/32 , H01L24/73 , H01L24/81 , H01L24/83 , H01L24/92 , H01L2224/131 , H01L2224/13109 , H01L2224/13111 , H01L2224/1601 , H01L2224/1605 , H01L2224/16225 , H01L2224/1703 , H01L2224/73104 , H01L2224/73204 , H01L2224/81143 , H01L2224/81193 , H01L2224/814 , H01L2224/81815 , H01L2224/83191 , H01L2224/83192 , H01L2224/83193 , H01L2224/8349 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01029 , H01L2924/01033 , H01L2924/01049 , H01L2924/014 , H01L2924/00014 , H01L2924/00
摘要: A method for making a microelectronic assembly includes providing a microelectronic element 30 with first conductive elements and a dielectric element 50 with second conductive elements. At least some of either the first conductive elements or the second conductive elements may be conductive posts 40 and other of the first or second conductive elements may include a bond metal 10 disposed between some of the conductive posts 40. An underfill layer 60 may overly some of the first or second conductive elements. At least one of the first conductive elements may be moved towards the other of the second conductive elements so that the posts pierce the underfill layer 60 and at least deform the bond metal 10. The microelectronic element 30 and the dielectric element 50 can be heated to join them together. The height of the posts 40 above the surface may be at least forty percent of a distance between surfaces of the microelectronic element 30 and dielectric element 50.
摘要翻译: 制造微电子组件的方法包括:将微电子元件30提供有第一导电元件和具有第二导电元件的电介质元件50。 第一导电元件或第二导电元件中的至少一些可以是导电柱40,并且第一或第二导电元件中的另一个可以包括设置在一些导电柱40之间的接合金属10.底部填充层60可能过度一些 的第一或第二导电元件。 第一导电元件中的至少一个可以朝向第二导电元件中的另一个移动,使得支柱刺穿底部填充层60并且至少使接合金属10变形。微电子元件30和电介质元件50可被加热到 一起加入 表面上方的柱40的高度可以是微电子元件30和电介质元件50的表面之间的距离的至少40%。
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公开(公告)号:WO2012070381A1
公开(公告)日:2012-05-31
申请号:PCT/JP2011/075707
申请日:2011-11-08
发明人: 久保 雅洋
CPC分类号: H05K1/18 , G02B6/4214 , G02B6/4232 , G02B6/4239 , G02B6/4274 , H01L23/13 , H01L24/13 , H01L24/16 , H01L24/17 , H01L24/81 , H01L2224/0401 , H01L2224/05568 , H01L2224/05571 , H01L2224/05624 , H01L2224/05644 , H01L2224/05655 , H01L2224/10145 , H01L2224/10175 , H01L2224/13011 , H01L2224/13019 , H01L2224/13023 , H01L2224/13109 , H01L2224/13111 , H01L2224/1319 , H01L2224/16237 , H01L2224/17505 , H01L2224/17517 , H01L2224/29111 , H01L2224/81191 , H01L2224/81192 , H01L2224/81193 , H01L2224/81385 , H01L2224/814 , H01L2224/81815 , H01L2224/81902 , H01L2924/12042 , H01L2924/15787 , H05K1/0274 , H05K1/111 , H05K3/3421 , H05K3/3436 , H05K2201/09045 , H05K2201/09472 , H05K2203/0307 , H05K2203/1173 , Y02P70/613 , Y10T29/49144 , H01L2924/01082 , H01L2924/01047 , H01L2924/01029 , H01L2924/00014 , H01L2924/01083 , H01L2924/00012 , H01L2924/01049 , H01L2924/014 , H01L2924/00
摘要: 使用環境温度が高温になる場合においても、高精度な接続信頼性を維 持することが可能な、実装構造を提供する。 本発明の実装構造(10)は、電子部品(11)と、金属(12)と、配線基盤(13)と、抑制構造と、を備える。電子部品(11)は第一の電極(14)を有する。金属(12)は、融点が130℃以下である。配線基板(13)は、金属(12)を介して第一の電極(14)と電気的に接続された第二の電極(15)を有する。抑制構造は、第一の電極(14)及び第二の電極(15)が形成された領域の外部に溶融状態の金属(12)が流出することを抑制する。さらに、抑制構造(14)は、電子部品及(11)び配線基板(12)の少なくとも一方に形成されている。
摘要翻译: 提供一种安装结构,即使在使用环境温度高的情况下也可以保持高精度的连接可靠性。 该安装结构(10)包括:电子部件(11); 金属(12); 布线基板(13); 和抑制结构。 电子部件(11)还包括第一电极(14)。 金属(12)的熔点为130度以下。 布线基板(13)还包括经由金属(12)与第一电极(14)电连接的第二电极(15)。 抑制结构抑制熔融状态的金属(12)从由第一电极(14)和第二电极(15)形成的区域外部逸出。 此外,抑制结构(14)形成在至少电子部件(11)或布线基板(12)上。
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公开(公告)号:WO2016019335A1
公开(公告)日:2016-02-04
申请号:PCT/US2015/043283
申请日:2015-07-31
申请人: KYOCERA AMERICA, INC. , LIEU, Dinah
发明人: LIEU, Dinah
IPC分类号: H01L23/488 , H01L23/12
CPC分类号: H01L24/13 , H01L24/11 , H01L24/16 , H01L24/29 , H01L24/32 , H01L24/81 , H01L2224/11003 , H01L2224/1134 , H01L2224/1182 , H01L2224/11901 , H01L2224/1308 , H01L2224/13083 , H01L2224/13124 , H01L2224/13144 , H01L2224/13147 , H01L2224/1356 , H01L2224/13562 , H01L2224/1357 , H01L2224/136 , H01L2224/13611 , H01L2224/16227 , H01L2224/16238 , H01L2224/16245 , H01L2224/16258 , H01L2224/2919 , H01L2224/32225 , H01L2224/32245 , H01L2224/73204 , H01L2224/81191 , H01L2224/81201 , H01L2224/814 , H01L2224/81444 , H01L2224/8149 , H01L2224/81815 , H01L2924/351 , H01L2924/3512 , H01L2924/014 , H01L2924/00014 , H01L2924/01082 , H01L2924/01079 , H01L2924/01047 , H01L2924/01029 , H01L2924/00012 , H01L2924/00
摘要: Forming the chip attachment system includes obtaining a chip having a bump core on a die. The method also includes obtaining an intermediate structure having a transfer pad on a substrate. The method further includes transferring the transfer pad from the substrate to the bump core such that the transfer pad becomes a solder layer on the bump core.
摘要翻译: 形成芯片附接系统包括在芯片上获得具有凸块的芯片。 该方法还包括获得在基底上具有转移垫的中间结构。 该方法还包括将转移垫从衬底转移到凸起芯,使得转移垫变为凸点芯上的焊料层。
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5.MICROELECTRONIC PACKAGE WITH DUAL OR MULTIPLE - ETCHED FLIP -CHIP CONNECTORS AND CORRESPONDING MANUFACTURING METHOD 审中-公开
标题翻译: 具有双重或多个 - 被蚀刻的片状连接器和相应的制造方法的微电子封装公开(公告)号:WO2012006403A1
公开(公告)日:2012-01-12
申请号:PCT/US2011/043152
申请日:2011-07-07
申请人: TESSERA, INC. , HABA, Belgacem
发明人: HABA, Belgacem
IPC分类号: H01L23/485 , H01L23/498 , H01L21/60
CPC分类号: H01L23/48 , H01L21/4853 , H01L21/563 , H01L23/49811 , H01L23/49816 , H01L23/49822 , H01L23/49827 , H01L24/05 , H01L24/11 , H01L24/13 , H01L24/16 , H01L24/81 , H01L25/105 , H01L2224/0401 , H01L2224/0558 , H01L2224/05644 , H01L2224/0612 , H01L2224/114 , H01L2224/11472 , H01L2224/116 , H01L2224/11901 , H01L2224/13017 , H01L2224/13018 , H01L2224/13021 , H01L2224/13082 , H01L2224/13144 , H01L2224/13147 , H01L2224/16225 , H01L2224/16227 , H01L2224/16238 , H01L2224/17515 , H01L2224/81136 , H01L2224/81193 , H01L2224/81203 , H01L2224/814 , H01L2224/81805 , H01L2224/81815 , H01L2224/8182 , H01L2224/81893 , H01L2225/06517 , H01L2225/0652 , H01L2924/00013 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01019 , H01L2924/01022 , H01L2924/01024 , H01L2924/01029 , H01L2924/01032 , H01L2924/01033 , H01L2924/0105 , H01L2924/01057 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01322 , H01L2924/014 , H01L2924/10253 , H01L2924/10329 , H01L2924/00014 , H01L2224/13099 , H01L2924/00 , H01L2924/00012
摘要: A packaged microelectronic element (900) can include a microelectronic element (902) having a front surface (909) and a plurality of first solid metal posts (916) extending away from the front surface. A substrate (901) can have a major surface (906) and a plurality of conductive elements (912) exposed at the major surface and joined to the first solid metal posts (916). In particular examples, the conductive elements (912) can be bond pads (992) or can be second posts (108) having top surfaces (111) and edge surfaces (113) extending at substantial angles away therefrom. Each first solid metal post (916) can include a base region (36) adjacent to the microelectronic element (902) and a tip region (32) remote from the microelectronic element, the base region and tip region having respective concave circumferential surfaces (46, 44). The first solid metal posts (916) are formed in a multi-step etching process which allows formation of unitary metallic microcontacts or posts from a single metallic layer with combinations of pitch, tip diameter and height not attainable in conventional etching processes. As a variation, posts (932) extending from a top surface of the substrate (921) include multiple - etched conductive posts while posts (936) extending from the microelectronic element (922) may be any type of conductive posts or, as another variation, posts (952) extending from a top surface of the substrate (941) and posts (956) extending from a front surface of the microelectronic element (942) include multiple - etched conductive posts.
摘要翻译: 封装的微电子元件(900)可以包括具有前表面(909)和远离前表面延伸的多个第一固体金属柱(916)的微电子元件(902)。 基板(901)可以具有主表面(906)和暴露在主表面处并且连接到第一固体金属柱(916)的多个导电元件(912)。 在特定示例中,导电元件(912)可以是接合焊盘(992),或者可以是具有从基本角度延伸的顶表面(111)和边缘表面(113)的第二柱(108)。 每个第一固体金属柱(916)可以包括与微电子元件(902)相邻的基部区域(36)和远离微电子元件的尖端区域(32),基部区域和尖端区域具有相应的凹形周向表面(46 ,44)。 第一固体金属柱(916)以多步蚀刻工艺形成,其允许在单一金属层中形成单一金属微接触体或柱,其具有在常规蚀刻工艺中不可获得的节距,尖端直径和高度的组合。 作为变型,从基板(921)的顶表面延伸的柱(932)包括多个蚀刻的导电柱,而从微电子元件(922)延伸的柱(936)可以是任何类型的导电柱,或者作为另一变型 ,从基板(941)的顶表面延伸的柱(952)和从微电子元件(942)的前表面延伸的柱(956)包括多个蚀刻的导电柱。
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公开(公告)号:WO2009085409A1
公开(公告)日:2009-07-09
申请号:PCT/US2008/082975
申请日:2008-11-10
发明人: LIANG, Steve, X.
CPC分类号: H01L24/14 , B81B7/0077 , B81C2203/0109 , B81C2203/0118 , B81C2203/019 , H01L23/293 , H01L23/3121 , H01L23/3142 , H01L23/315 , H01L24/06 , H01L24/13 , H01L24/16 , H01L24/81 , H01L2224/0401 , H01L2224/05144 , H01L2224/10135 , H01L2224/1134 , H01L2224/11462 , H01L2224/13082 , H01L2224/131 , H01L2224/13144 , H01L2224/13147 , H01L2224/16225 , H01L2224/16227 , H01L2224/81139 , H01L2224/8114 , H01L2224/81191 , H01L2224/81207 , H01L2224/814 , H01L2224/81439 , H01L2224/81444 , H01L2224/81447 , H01L2224/81464 , H01L2224/8183 , H01L2924/00013 , H01L2924/01029 , H01L2924/01046 , H01L2924/01078 , H01L2924/01079 , H01L2924/014 , H01L2924/14 , H01L2924/1461 , H01L2924/181 , H01L2924/19041 , H01L2924/19042 , H01L2924/19043 , H03H9/0523 , H03H9/059 , H01L2924/00014 , H01L2924/01014 , H01L2224/13099 , H01L2224/05099 , H01L2224/13599 , H01L2224/05599 , H01L2224/29099 , H01L2224/29599 , H01L2924/00
摘要: A flip chip semiconductor packaging device and method that incorporates in situ formation of cavities underneath selected portions of a die during a flip chip die bonding process. A method of flip chip semiconductor component packaging includes providing a die having a first surface, forming a barrier on first surface of the die, the barrier at least partially surrounding a designated location on the first surface of the die, bonding the die to a substrate in a flip chip configuration, and flowing molding compound over the die and over at least a portion of the substrate. Bonding the die to the substrate includes causing contact between the barrier and the substrate such that flow of the molding compound is blocked by the barrier to provide a cavity between the die and the substrate, the cavity being proximate the designated location on the first surface of the die.
摘要翻译: 一种倒装芯片半导体封装器件和方法,其在倒装晶片管芯接合工艺期间并入在管芯的选定部分的原位形成腔体。 一种倒装芯片半导体部件封装的方法包括:提供具有第一表面的管芯,在管芯的第一表面上形成阻挡层,所述阻挡层至少部分地围绕在管芯的第一表面上的指定位置,将管芯结合到衬底 在倒装芯片配置中,并且在模具上方并且在衬底的至少一部分上方流动模制化合物。 将管芯结合到衬底包括引起阻挡层和衬底之间的接触,使得模制化合物的流动被阻挡物阻挡以在管芯和衬底之间提供空腔,腔体在第一表面的指定位置附近 死了
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公开(公告)号:WO2008008798A1
公开(公告)日:2008-01-17
申请号:PCT/US2007/073186
申请日:2007-07-10
CPC分类号: H05K3/3452 , H01L24/13 , H01L2224/0554 , H01L2224/05568 , H01L2224/05573 , H01L2224/131 , H01L2224/16237 , H01L2224/81191 , H01L2224/81192 , H01L2224/814 , H01L2924/00013 , H01L2924/00014 , H01L2924/01015 , H01L2924/01029 , H01L2924/01033 , H01L2924/01046 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01327 , H01L2924/014 , H01L2924/14 , H01L2924/19041 , H05K2201/0989 , H05K2201/10674 , H01L2224/13099 , H01L2224/13599 , H01L2224/05599 , H01L2224/05099 , H01L2224/29099 , H01L2224/29599 , H01L2224/0555 , H01L2224/0556
摘要: An integrated circuit mount system (500) includes an integrated circuit (108), a solder mask (202) for the integrated circuit (108), and a solder mask pad (102) on the substrate (104) with the solder mask (202).
摘要翻译: 一种集成电路安装系统(500)包括集成电路(108),用于集成电路(108)的焊接掩模(202)以及具有焊接掩模(202)的衬底(104)上的焊接掩模垫(102) )。
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公开(公告)号:WO2015198839A1
公开(公告)日:2015-12-30
申请号:PCT/JP2015/066351
申请日:2015-06-05
申请人: ソニー株式会社
CPC分类号: H01L24/16 , H01L21/563 , H01L21/6836 , H01L23/12 , H01L23/3121 , H01L23/3142 , H01L23/49838 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/13 , H01L24/14 , H01L24/29 , H01L24/32 , H01L24/48 , H01L24/73 , H01L24/81 , H01L24/83 , H01L24/92 , H01L25/03 , H01L25/0655 , H01L25/0657 , H01L25/105 , H01L2221/68327 , H01L2221/6834 , H01L2224/0345 , H01L2224/03614 , H01L2224/0381 , H01L2224/03912 , H01L2224/05166 , H01L2224/05173 , H01L2224/05647 , H01L2224/10175 , H01L2224/1146 , H01L2224/11462 , H01L2224/1147 , H01L2224/1181 , H01L2224/11849 , H01L2224/119 , H01L2224/13014 , H01L2224/13082 , H01L2224/13083 , H01L2224/131 , H01L2224/13109 , H01L2224/13111 , H01L2224/13139 , H01L2224/13147 , H01L2224/13155 , H01L2224/14131 , H01L2224/14133 , H01L2224/14136 , H01L2224/16013 , H01L2224/16055 , H01L2224/16057 , H01L2224/16058 , H01L2224/16227 , H01L2224/16237 , H01L2224/16503 , H01L2224/2919 , H01L2224/2929 , H01L2224/29387 , H01L2224/32225 , H01L2224/48091 , H01L2224/48106 , H01L2224/48227 , H01L2224/73204 , H01L2224/81011 , H01L2224/81012 , H01L2224/81065 , H01L2224/81075 , H01L2224/8112 , H01L2224/81121 , H01L2224/81143 , H01L2224/81191 , H01L2224/81201 , H01L2224/81203 , H01L2224/81204 , H01L2224/8121 , H01L2224/81385 , H01L2224/81444 , H01L2224/81815 , H01L2224/81893 , H01L2224/81906 , H01L2224/81907 , H01L2224/8191 , H01L2224/81935 , H01L2224/81986 , H01L2224/831 , H01L2224/83104 , H01L2224/83192 , H01L2224/83204 , H01L2224/83862 , H01L2224/83907 , H01L2224/92 , H01L2224/9211 , H01L2224/92125 , H01L2225/0651 , H01L2225/06517 , H01L2225/0652 , H01L2225/06562 , H01L2225/06572 , H01L2225/06586 , H01L2924/00014 , H01L2924/00015 , H01L2924/01028 , H01L2924/01046 , H01L2924/01079 , H01L2924/014 , H01L2924/15151 , H01L2924/15311 , H01L2924/15747 , H01L2924/181 , H01L2924/351 , H01L2924/381 , H01L2924/3841 , H05K1/111 , H05K3/3436 , H05K3/3452 , H05K2201/09227 , H05K2201/09663 , H05K2201/0979 , H05K2201/0989 , H05K2201/10674 , Y02P70/611 , Y02P70/613 , H01L2924/00012 , H01L2224/16225 , H01L2924/00 , H01L2224/81 , H01L2224/83 , H01L2924/05442 , H01L2924/01047 , H01L2924/01074 , H01L2224/814 , H01L2224/45099 , H01L2221/68304 , H01L21/304 , H01L2221/68381 , H01L21/78 , H01L2224/03 , H01L2224/11
摘要: 半導体チップは、チップ本体と、チップ本体の素子形成面に設けられたはんだを含む複数の電極とを有する。パッケージ基板は、基板本体と、基板本体の表面に設けられた複数の配線およびソルダレジスト層とを有する。はんだを含む複数の電極は、第1の電位を供給する複数の第1電極と、第1の電位とは異なる第2の電位を供給する複数の第2電極とを含む。複数の第1電極および複数の第2電極は、チップ本体の中央部に、行方向および列方向の両方に交互に配置されている。複数の配線は、複数の第1電極を相互に接続する複数の第1配線と、複数の第2電極を相互に接続する複数の第2配線とを含む。
摘要翻译: 本发明的半导体芯片包括主芯片体和设置在所述主芯片体的元件形成表面上的多个焊料包含电极。 封装基板包括:主基板主体; 以及设置在所述主基板主体的表面上的多根导线和阻焊层。 多个含焊料的电极包括提供第一电位的多个第一电极和提供不同于第一电位的第二电位的多个第二电极。 多个第一电极和多个第二电极在主芯片体的中间沿行方向和列方向交替布置。 上述多根线包括将多个第一电极彼此连接的多条第一线和将多个第二电极彼此连接的多条第二线。
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公开(公告)号:WO2015045997A1
公开(公告)日:2015-04-02
申请号:PCT/JP2014/074630
申请日:2014-09-18
申请人: 東レエンジニアリング株式会社
CPC分类号: H01L24/75 , B23K20/026 , H01L24/81 , H01L24/83 , H01L24/92 , H01L24/97 , H01L2224/73204 , H01L2224/75252 , H01L2224/75301 , H01L2224/75702 , H01L2224/75745 , H01L2224/75753 , H01L2224/75822 , H01L2224/75824 , H01L2224/759 , H01L2224/75901 , H01L2224/7598 , H01L2224/81191 , H01L2224/81203 , H01L2224/81204 , H01L2224/814 , H01L2224/81815 , H01L2224/81903 , H01L2224/83192 , H01L2224/83203 , H01L2224/83204 , H01L2224/83862 , H01L2224/83907 , H01L2224/9205 , H01L2224/9211 , H01L2224/9212 , H01L2224/92143 , H01L2224/97 , H01L2924/381 , H01L2924/00012 , H01L2924/014 , H01L2224/81 , H01L2224/83
摘要: 接合時に、所望の接合温度プロファイルを得るための、加熱手段の設定温度プロファイルを比較的容易に求めることが出来て、接合品質に機差のない実装装置および実装方法を提供する。具体的には、半導体チップを配線基板に加熱圧着して接合する実装で、配線基板を保持するステージと、半導体チップを配線基板に押圧する熱圧着ツールと、熱圧着ツールを加熱する加熱手段と、前記加熱手段を任意の設定温度プロファイルで稼働させる機能を有した制御手段とを備え、前記制御手段が、前記加熱手段の設定温度と、接合部温度の関係を表す伝達関数を得ることで、接合部温度を所望のプロファイルとするための、前記加熱手段の設定温度プロファイルを求める機能を有している、実装装置および実装方法を提供する。
摘要翻译: 提供一种安装装置和安装方法,通过该安装装置和安装方法可以相对容易地计算出用于在接合期间获得期望的接合温度分布的加热装置的设定温度分布,并且在装置之间没有接合质量的差异。 具体地,提供了一种安装装置和安装方法,其具有:在将半导体芯片热接合到布线基板的阶段,用于保持布线基板; 用于将半导体芯片按压到布线基板上的热压工具; 用于加热热压工具的加热装置; 以及具有根据任意设定温度曲线来操作加热装置的功能的控制装置,控制装置获得表示加热装置的设定温度与接合部温度之间的关系的传递函数,以计算设定温度 用于加热装置的外形,以便获得用于接合部分温度的所需轮廓。
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公开(公告)号:WO2014074776A1
公开(公告)日:2014-05-15
申请号:PCT/US2013/069057
申请日:2013-11-08
发明人: DO, Won Chul , PARK, Doo Hyun , PAEK, Jong Sik , LEE, Ji, Hun , SEO, Seong Min
CPC分类号: H01L21/4846 , H01L21/481 , H01L21/4853 , H01L21/56 , H01L21/561 , H01L21/563 , H01L21/568 , H01L21/6835 , H01L23/04 , H01L23/3128 , H01L23/3135 , H01L23/3675 , H01L23/49811 , H01L23/49816 , H01L23/49822 , H01L23/49827 , H01L23/49838 , H01L23/5384 , H01L24/13 , H01L24/16 , H01L24/81 , H01L25/0655 , H01L2221/68345 , H01L2221/68381 , H01L2224/13082 , H01L2224/131 , H01L2224/13147 , H01L2224/16225 , H01L2224/16227 , H01L2224/16238 , H01L2224/32225 , H01L2224/32245 , H01L2224/73204 , H01L2224/73253 , H01L2224/81005 , H01L2224/81191 , H01L2224/814 , H01L2224/81801 , H01L2224/83005 , H01L2224/92125 , H01L2924/05042 , H01L2924/05442 , H01L2924/10253 , H01L2924/15311 , H01L2924/16251 , H01L2924/1816 , H01L2924/18161 , H01L2924/19105 , H01L2924/00012 , H01L2924/00 , H01L2924/014 , H01L2924/00014
摘要: Provided are a semiconductor device including an interposer having a relatively thin thickness without a through silicon via and a method of manufacturing the same. The method of manufacturing a semiconductor device includes forming an interposer including a redistribution layer and a dielectric layer on a dummy substrate, connecting a semiconductor die to the redistribution layer facing an upper portion of the interposer, encapsulating the semiconductor die by using an encapsulation, removing the dummy substrate from the interposer, and connecting a bump to the redistribution layer facing a lower portion of the interposer.
摘要翻译: 提供一种半导体器件及其制造方法,该半导体器件具有不具有通过硅通孔的相对较薄厚度的中介层。 制造半导体器件的方法包括在虚设衬底上形成包括再分配层和电介质层的插入件,将半导体管芯连接到面向插入件上部的再分配层,通过使用封装,去除 所述虚拟衬底从所述插入器连接,并且将凸块连接到面向所述插入件的下部的再分配层。
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