USING MILLISECOND PULSED LASER WELDING IN MEMS PACKAGING
    84.
    发明申请
    USING MILLISECOND PULSED LASER WELDING IN MEMS PACKAGING 有权
    在MEMS包装中使用MILLISECOND脉冲激光焊接

    公开(公告)号:US20140126167A1

    公开(公告)日:2014-05-08

    申请号:US13982427

    申请日:2012-01-31

    IPC分类号: B81C3/00 H05K1/18 B23K26/24

    摘要: A new packaging method for a wide range of MEMS for application on both the wafer and device scale. Titanium is used as the packaging material and both silicon and titanium MEMS devices are integrated on to a titanium substrate. A Nd:YAG pulsed laser is used to micro-weld the titanium cap to the substrate. A three-dimensional time dependent model of heat flow during laser beam welding is presented. The heat transfer and parametric design capabilities of COMSOL were employed for this purpose. Model calculations are compared and calibrated with experimental results of pulsed laser welds. The functionality and hermiticity of the proposed packaging was evaluated by packaging a self actuated Veeco Instrument AFM cantilever tip. The experimental measurements show that the resonance frequency and quality factor of the device stay the same before and after packaging and the applied technique has no effect on the device.

    摘要翻译: 一种适用于晶圆和器件规模应用的广泛MEMS的新型封装方法。 钛用作包装材料,硅和钛MEMS器件都集成在钛基板上。 使用Nd:YAG脉冲激光将钛盖微焊接到基板上。 提出了激光束焊接过程中热流三维时间依赖模型。 为此,采用COMSOL的传热和参数设计能力。 模型计算与脉冲激光焊接的实验结果进行比较和校准。 通过包装自动驱动的Veeco仪器AFM悬臂尖端来评估所提出的包装的功能和隐性。 实验测量结果表明,器件的共振频率和品质因数在包装前后保持不变,应用技术对设备无影响。